公开(公告)号：EP1293741A4

公开(公告)日：2004-11-17

申请号：EP01934346

申请日：2001-05-25

申请人： MATSUSHITA ELECTRIC IND CO LTD

发明人： TSUTSUI YUJI ,  NAKA HIROYUKI

IPC分类号： F26B15/10 ,  F26B25/08 ,  F27B9/02 ,  F27B9/08 ,  F27B9/26 ,  F27D1/00 ,  F27D1/14 ,  H01L21/00 ,  F27B5/02 ,  F27B5/10 ,  F27B9/40

CPC分类号： H01L21/67103 ,  C03B25/08 ,  C03B29/08 ,  C03B35/14 ,  F26B15/10 ,  F26B25/08 ,  F27B9/028 ,  F27B9/08 ,  F27B9/26 ,  F27D1/145 ,  F27D2001/0069

摘要： A heat treatment apparatus comprises heat treatment chambers into which an object is transferred and heat-treated. At least one set of adjacent heat treatment chambers the temperatures of which are mutually different are connected through a heat-insulating structural member. As a result, the heat conduction between the heat treatment chambers (for example, muffles) is suppressed, and consequently the heat loss caused in the heat treatment chambers are decreased. Therefore the required heat input energy for predetermined heat treatments are significantly reduced without influencing the quality of the object and the yield.

公开(公告)号：EP0123694A4

公开(公告)日：1987-01-29

申请号：EP83902128

申请日：1983-07-05

申请人： MATSUSHITA ELECTRIC IND CO LTD

发明人： IMANISHI KIYOKAZU ,  ICHIYANAGI TAKASHI ,  SAKURAI YASUO ,  NAKA HIROYUKI ,  NAKAGAWA KOJI

IPC分类号： G11B15/61 ,  G11B15/60 ,  G11B15/52

CPC分类号： G11B15/61

公开(公告)号：EP0827783A4

公开(公告)日：2000-12-06

申请号：EP97904583

申请日：1997-02-20

申请人： MATSUSHITA ELECTRIC IND CO LTD ,  MATSUSHITA ELECTRONICS CORP

发明人： MITANI MASATO ,  NAKAJIMA KAZUTO ,  KOTANI HIROYUKI ,  HOKAZONO NOBUTAKA ,  NAKA HIROYUKI ,  YAMAGUCHI AKIRA ,  IKEDA JUNJI ,  AOKI NOBUYUKI

IPC分类号： B05B7/02 ,  B05B7/08 ,  B05C5/02 ,  B05C11/08 ,  H01J9/227 ,  B05C5/00

CPC分类号： B05B7/0884 ,  B05B7/02 ,  B05B7/025 ,  B05C5/02 ,  B05C5/0208 ,  B05C5/0254 ,  B05C5/027 ,  B05C11/08 ,  H01J9/227

摘要： Each of liquid application nozzles (4, 4a, 124) comprises a first block (41) having therein a liquid reservoir (43) extending in a longitudinal direction and an inner discharge portion composed of a multiplicity of small holes (44) formed in a bottom of the liquid reservoir (43) to extend along the longitudinal direction, a second block (42) having an inner space, which forms a gas reservoir (46) extending outside the first block (41) in the longitudinal direction, and an outer discharge portion composed of a multiplicity of small holes (48) and formed at the bottom of the inner space along the longitudinal direction and adapted to form a gas stream to surround from outside a linear-shaped liquid flow flowing down from the small holes (44), whereby a thin coating can be formed in a short time while suppressing consumption of a liquid and unevenness in coating is made hard to generate.

公开(公告)号：EP0117869A4

公开(公告)日：1987-02-03

申请号：EP83902129

申请日：1983-07-05

申请人： MATSUSHITA ELECTRIC IND CO LTD

发明人： IMANISHI KIYOKAZU ,  ICHIYANAGI TAKASHI ,  SAKURAI YASUO ,  NAKA HIROYUKI ,  KISHIMOTO MASARU

IPC分类号： G11B15/61 ,  G11B15/60 ,  G11B15/52

CPC分类号： G11B15/61