公开(公告)号：EP1293741A4

公开(公告)日：2004-11-17

申请号：EP01934346

申请日：2001-05-25

申请人： MATSUSHITA ELECTRIC IND CO LTD

发明人： TSUTSUI YUJI ,  NAKA HIROYUKI

IPC分类号： F26B15/10 ,  F26B25/08 ,  F27B9/02 ,  F27B9/08 ,  F27B9/26 ,  F27D1/00 ,  F27D1/14 ,  H01L21/00 ,  F27B5/02 ,  F27B5/10 ,  F27B9/40

CPC分类号： H01L21/67103 ,  C03B25/08 ,  C03B29/08 ,  C03B35/14 ,  F26B15/10 ,  F26B25/08 ,  F27B9/028 ,  F27B9/08 ,  F27B9/26 ,  F27D1/145 ,  F27D2001/0069

摘要： A heat treatment apparatus comprises heat treatment chambers into which an object is transferred and heat-treated. At least one set of adjacent heat treatment chambers the temperatures of which are mutually different are connected through a heat-insulating structural member. As a result, the heat conduction between the heat treatment chambers (for example, muffles) is suppressed, and consequently the heat loss caused in the heat treatment chambers are decreased. Therefore the required heat input energy for predetermined heat treatments are significantly reduced without influencing the quality of the object and the yield.