Method and device for redundant distance measurement and mismatch cancellation in phase-measurement systems
    2.
    发明公开
    Method and device for redundant distance measurement and mismatch cancellation in phase-measurement systems 有权
    用于冗余距离测量和用于拾取阶段方法和装置的偏移

    公开(公告)号:EP1752793A1

    公开(公告)日:2007-02-14

    申请号:EP05405466.3

    申请日:2005-08-08

    IPC分类号: G01S17/36 G01S17/89

    CPC分类号: G01S17/36 G01S7/497 G01S17/89

    摘要: The method serves for canceling errors caused by mismatch of different signal paths in a photodetector with a plurality (k) of storage elements for the photogenerated signals, as typically used in phase-measurement systems. The signal-capturing process is performed in at least two measurement cycles (j). A first cycle (j = 1) is executed with the conventional setup with no phase delay in the control signals. It is followed by further measurement cycles (j = 2, 3, 4) which use control signals shifted by a constant phase shift (90°). Corresponding signals are read out through different signal paths. At the end, the signals corresponding to a certain phase (Φ) are added, thus canceling possible offset values.

    摘要翻译: 的方法用于消除由在与存储元件的光产生的信号,如在相位测量系统的通常使用多个(k)的一个光检测器不同的信号路径失配引起的误差。 所述信号捕获过程在至少两个测量周期(j)的执行。 第一周期(J = 1)被执行与在控制信号中没有相位延迟的常规设置。 它由另外的测量周期随后(J = 2,3,4),其使用由恒定相移(90°)移控制信号。 相应的信号通过不同的信号路径中读出。 在结束时,对应于某一相位的信号(|)相加,从而消除可能的偏移值。