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公开(公告)号：EP4141281A1
公开(公告)日：2023-03-01
申请号：EP21192934.4
申请日：2021-08-24
申请人： MI-Partners BV
摘要： A device 31 is provided with a housing 33 and a movable unit 35 present therein. The space 7 between the inside 33b of the housing and the outside 35b of the movable unit is filled with gas having a pressure higher than the ambient pressure. By increasing the gas pressure in the space, more heat is transferred from the movable unit to the housing via the gas. In order to maintain this higher gas pressure in this space without the movable unit coming into contact with the housing, which entails friction and thus undesirable heat development, a contactless restriction 37 is arranged between the movable unit 35 and the housing 33. This restriction 37 is formed by two closely spaced restriction surfaces 33c and 35c of the inside of the housing and the outside of the movable unit.
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公开(公告)号：EP4283840A1
公开(公告)日：2023-11-29
申请号：EP23173641.4
申请日：2023-05-16
申请人： MI-Partners BV
发明人： WULLMS, Pieter Hubertus Godefrida , RUIJL, Theo Anjes Maria , KOORNEEF, Lucas Franciscus , LARO, Dick Antonius Hendrikus , WIJNHOVEN, Maryn Leonardus Johannes , PRINCEN, Martinus Cornelis Franciscus
摘要： There is provided an actuator system for moving an object. The actuator system comprises a rotor for supporting the object, and a stator. The rotor comprises a circular magnetic track for generating a magnetic field across a radial air gap. The circular magnetic track is coaxial to an axis extending in an axial direction. The stator comprises a first set of coils and a second set of coils. The first set of coils and the second set of coils are arranged at least partly in the radial air gap. The first set of coils extends axially on both sides beyond the circular magnetic track to generate a tangential electromagnetic force in a direction tangentially to the circular magnetic track to rotate the rotor relative to the stator about the axis. The second set of coils extends axially on only one side beyond the circular magnetic track to generate an axial electromagnetic force in the axial direction to move the rotor relative to the stator in the axial direction.
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公开(公告)号：EP3267145B1
公开(公告)日：2019-07-17
申请号：EP16192490.7
申请日：2016-10-05
申请人： MI-Partners BV
IPC分类号： G01B9/02
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4.发明公开MEASURING DEVICE FOR ACCURATELY DETERMINING THE DISPLACEMENT OF A ROTATING TEST OBJECT PROVIDED WITH A LIGHT REFLECTIVE SURFACE 审中-公开用于准确确定旋转测试对象位移的测量装置，该旋转测试对象具有光反射表面
公开(公告)号：EP3267145A1
公开(公告)日：2018-01-10
申请号：EP16192490.7
申请日：2016-10-05
申请人： MI-Partners BV
IPC分类号： G01B9/02
CPC分类号： G01B9/02061
摘要： A measuring device of the interferometer type has an optical system 2, as well as a light source 1 and a sensor 3. The optical system has a beam splitter 4 and a reflector 9 which is under 45° with respect to light-splitting surface 5 of the beam splitter. The measuring object 21 is present in line with the beam of light emitted by the light source 6 and is located at the rear side of the beam splitter. The measuring device further comprises a further optical system 13, which is such that a reflected from the light reflecting surface 21A of the object to be measured, and in the further optical system incoming light beam in the same direction and at the same site as that in which it entered, is sent back. This may also be the case of relatively large skewness of the measurement object 21, the object of the measurement reflected light beam in itself will be sent back.
摘要翻译： 干涉仪类型的测量装置具有光学系统2以及光源1和传感器3.光学系统具有分束器4和相对于分光表面5成45°的反射器9 的分束器。 测量对象21与光源6发出的光束一致并位于分束器的后侧。 测量装置进一步包括另外的光学系统13，该另外的光学系统13使得从被测量物体的光反射表面21A反射，并且在另一光学系统中以相同的方向并且在相同的位置处 在它进入，被送回。 这也可能是测量对象21相对较大偏斜的情况，测量反射光束本身的对象将被发回。
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