公开(公告)号：EP1849181A4

公开(公告)日：2009-03-18

申请号：EP06719038

申请日：2006-01-20

申请人： MICROCONTINUUM INC

发明人： SLAFER DENNI W

IPC分类号： G03F7/00 ,  G03C5/00 ,  G03F7/24

CPC分类号： G11B7/263 ,  B29C33/3857 ,  B29C59/04 ,  B29L2031/757 ,  B82Y10/00 ,  B82Y40/00 ,  C25D1/02 ,  C25D1/10 ,  C25D3/04 ,  C25D3/12 ,  C25D3/46 ,  C25D3/48 ,  C25D5/02 ,  C25D5/022 ,  C25D7/04 ,  C25D17/02 ,  C25D17/04 ,  C25D17/06 ,  C25D17/12 ,  C25D21/02 ,  C25D21/06 ,  C25D21/10 ,  G03F7/0002 ,  G03F7/24 ,  G11B7/26 ,  G11B7/261

摘要： Durable seamless replication tools are disclosed for replication of seamless relief patterns in desired media, for example in optical recording or data storage media. Methods of making such durable replication tools are disclosed, including preparing a recording substrate on the inner surface of a support cylinder, recording and developing a relief pattern in the substrate, creating a durable negative relief replica of the pattern, extracting the resulting durable tool sleeve from a processing cell, and mounting the tool sleeve on a mounting fixture. Apparatus are disclosed for fabricating such seamless replication tools, including systems for recording a desired relief pattern on a photosensitive layer on an inner surface of a support cylinder. Also disclosed are electrodeposition cells for forming a durable tool sleeve having a desired relief pattern. The replication tool relief features may have critical dimensions down to the micron and nanometer regime.