公开(公告)号：EP0833137A2

公开(公告)日：1998-04-01

申请号：EP97116849.7

申请日：1997-09-29

申请人： MOTOROLA, INC.

发明人： Baskett, Ira E. ,  McNeil, Andrew C.

IPC分类号： G01L1/22

CPC分类号： G01L1/2275 ,  G01L9/0055 ,  G01L9/06

摘要： A circuit and method for correcting a sense signal of a sensor (100) where the sense signal is reduced by a negative nonlinear error component introduced by membrane stress in a sensor structure (101). A first transducer (103) is disposed at a location (203) having substantial bending stress to produce a sense signal having a linear component and the nonlinear error component. A second transducer (102) is disposed at a location (202) with substantially zero bending stress to produce a sense signal having the nonlinear error component but a substantially zero linear component. The sense signal from the second transducer (102) is added to the sense signal from the first transducer (103) to correct the nonlinear error for producing a linear output sense signal (V OUT ) of the sensor (100) which is representative of the physical condition.

公开(公告)号：EP0833137A3

公开(公告)日：1999-05-19

申请号：EP97116849.7

申请日：1997-09-29

申请人： MOTOROLA, INC.

发明人： Baskett, Ira E. ,  McNeil, Andrew C.

IPC分类号： G01L1/22

CPC分类号： G01L1/2275 ,  G01L9/0055 ,  G01L9/06

摘要： A circuit and method for correcting a sense signal of a sensor (100) where the sense signal is reduced by a negative nonlinear error component introduced by membrane stress in a sensor structure (101). A first transducer (103) is disposed at a location (203) having substantial bending stress to produce a sense signal having a linear component and the nonlinear error component. A second transducer (102) is disposed at a location (202) with substantially zero bending stress to produce a sense signal having the nonlinear error component but a substantially zero linear component. The sense signal from the second transducer (102) is added to the sense signal from the first transducer (103) to correct the nonlinear error for producing a linear output sense signal (V OUT ) of the sensor (100) which is representative of the physical condition.

摘要翻译： 的电路和方法，用于校正在感测信号是由膜应力在传感器结构（101）中引入负的非线性误差成分降低一个传感器（100）的感测信号。 第一换能器（103）在具有相当大的弯曲应力，以产生具有线性成分和非线性误差成分的检测信号的位置（203）被布置。 第二换能器（102）的位置处（202）具有基本零弯曲应力被配置为产生具有非线性误差成分而基本上为零的线性成分的感测信号。 从第二换能器（102）的感测信号被添加到从所述第一换能器（103）感测信号，以校正所述非线性误差用于制造传感器的线性输出感测信号（VOUT）（100），所有这些是代表物理的 条件。