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9 条记录 (耗时 0.014 秒)

    Angular velocity sensor
    1.
    发明公开
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号：EP0990872A1

    公开(公告)日：2000-04-05

    申请号：EP99119375.6

    申请日：1999-09-29

    申请人： Murata Manufacturing Co., Ltd.

    发明人： Moriya, Kazufumi

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5719

    摘要： An angular velocity sensor (10) including a framelike vibrator (5) supported on a fixed support portion (2) via a pair of beams (3, 4). The framelike vibrator (5) is placed into an inertial state by being vibrated by a driving means, and a displacement of the framelike vibrator (5) due to Coriolis force is detected. The fixed support portion (2) is formed on a support substrate (1) made of a material having a different coefficient of thermal expansion in the center of the framelike vibrator (5), and the beams (3, 4) are T-shaped and include a first beam portion (3a, 4a) for displacing the framelike vibrator (5) by the driving means in the driving direction, and a second beam portion (3b, 4b) for displacing the framelike vibrator (5) in the direction of generation of the Coriolis force.

    摘要翻译： 一种角速度传感器（10），包括通过一对梁（3,4）支撑在固定支撑部分（2）上的框架式振动器（5）。 框状振动器5通过由驱动装置振动而被置于惯性状态，并检测由科里奥利力引起的框架状振动器5的位移。 固定支撑部分（2）形成在由框架状振动器（5）的中心处具有不同热膨胀系数的材料制成的支撑基板（1）上，并且梁（3,4）为T形 并且包括用于通过驱动装置在驱动方向上移动框架型振动器（5）的第一梁部分（3a，4a）以及用于使框架型振动器（5）在驱动方向上移动的第二梁部分（3b，4b） 科里奥利力量的产生。

    Angular velocity sensor
    3.
    发明公开
    Angular velocity sensor 失效
    Drehgeschwindigkeitssensor

    公开(公告)号：EP0778458A1

    公开(公告)日：1997-06-11

    申请号：EP96119571.6

    申请日：1996-12-05

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Moriya, Kazufumi

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5719

    摘要： An angular velocity sensor includes a movable bi-directional electrode (27, 27') and a fixed bi-directional electrode (31, 31') wherein L-shaped electrode plates of the movable bi-directional vibration-urging electrode (27, 27') mesh in spaced relationship with L-shaped electrode plates of the fixed bi-directional electrode (31, 31'). In one embodiment in response to a vibration driving signal applied between the electrodes, a vibration plate (26) vibrates with a large amplitude in one direction parallel to the direction in which bent parts of the L-shaped electrode plates extend. If an angular velocity ΩZ about the Z axis is applied to the vibration plate (26), the vibration plate is greatly displaced in the Y direction by Coriolis force. This displacement is detected by a displacement detecting part (38) with high accuracy. In another embodiment, the bi-directional electrodes (27', 31') serve as the displacement detecting part (92).

    摘要翻译： 角速度传感器包括可移动双向电极（27,27'）和固定双向电极（31,31'），其中可动双向振动电极（27,27）的L形电极板 '）与固定双向电极（31,31'）的L形电极板间隔开。 在一个实施例中，响应于施加在电极之间的振动驱动信号，振动板（26）在平行于L形电极板的弯曲部分延伸的方向的一个方向上以大幅度振动。 如果围绕Z轴的角速度OMEGA Z施加到振动板（26），则振动板通过科里奥利力在Y方向上大大移位。 该位移由位移检测部（38）以高精度检测。 在另一个实施例中，双向电极（27'，31'）用作位移检测部分（92）。

    Angular velocity sensor
    4.
    发明公开
    Angular velocity sensor 失效

    公开(公告)号：EP0785413A3

    公开(公告)日：2000-12-06

    申请号：EP97100983.2

    申请日：1997-01-22

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Moriya, Kazufumi ,  Hasegawa, Tomoyasu ,  Takata, Eiichi ,  Shibano, Tomio ,  Osawa, Tetsuo

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5719

    摘要： In an angular velocity sensor for sensing angular velocities about two axes or an X-axis and a Y-axis which are perpendicular to each other, a frame-shaped oscillator (26) is disposed to the respective support portions (24) fixed on a substrate (22) through support beams (25) and a columnar electrode (33) is disposed in the oscillator (26) by being fixed to the substrate (22). X-axis displacement sensing units (31) are formed on the right and left sides of the oscillator (26) and Y-axis displacement sensing units (32) are formed to the forward and rearward sides thereof. When an oscillation drive signal is imposed between the oscillator (26) and the columnar electrode (33), an electrostatic attracting force is generated therebetween and the oscillator (26) is oscillated in a Z- axis direction. When an angular velocity ΩY is imposed about the Y-axis at this time, the oscillator (26) is displaced to the X-axis by an Coriolis force and the displacement can be sensed by the X-axis displacement sensing units (31), whereas when an angular velocity ΩX is imposed about the X-axis, the oscillator (26) is displaced to the Y-axis by an Coriolis force and the displacement can be sensed by the Y-axis displacement sensing units (32), so that the angular velocities about the two axes or the X-axis and the Y-axis can be sensed, respectively.

    Angular velocity sensor
    5.
    发明公开
    Angular velocity sensor 失效
    Winkelgeschwindigkeitsaufnehmer

    公开(公告)号：EP0795737A1

    公开(公告)日：1997-09-17

    申请号：EP97104070.4

    申请日：1997-03-11

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Moriya, Kazufumi ,  Hasegawa, Tomoyasu ,  Takata, Eiichi ,  Shibano, Tomio ,  Osawa, Tetsuo

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5719

    摘要： A downsized angular velocity sensor (21) is disclosed in which the detection sensitivity is improved. An oscillator (26) oscillatably supported by support beams along two horizontal axes is formed of two rod-like members (26A) extending along the Y axis and an interconnecting portion (26B). A hollow region is formed between each of the rod-like members (26A) and the interconnecting portion (26B). Displacement detecting sections (34) are disposed in the hollow regions. The displacement detecting sections (34) are each constructed of an antenna-like electrode array (28, 32), so that a greater amount of change in capacitance generated between the antenna-like electrodes (28, 32) can be obtained.

    摘要翻译： 公开了一种小型化的角速度传感器（21），其中提高了检测灵敏度。 由沿着Y轴延伸的两个杆状构件（26A）和互连部分（26B）形成由沿着两个水平轴线的支撑梁可摆动地支撑的振荡器（26）。 在每个棒状构件（26A）和互连部分（26B）之间形成中空区域。 位移检测部（34）设置在中空部。 位移检测部分（34）各自由天线状电极阵列（28,32）构成，从而可以获得在天线状电极（28,32）之间产生的更大量的电容变化。

    Angular velocity sensor
    9.
    发明公开
    Angular velocity sensor 失效
    角速度传感器

    公开(公告)号：EP0785413A2

    公开(公告)日：1997-07-23

    申请号：EP97100983.2

    申请日：1997-01-22

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Moriya, Kazufumi ,  Hasegawa, Tomoyasu ,  Takata, Eiichi ,  Shibano, Tomio ,  Osawa, Tetsuo

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5719

    摘要： In an angular velocity sensor for sensing angular velocities about two axes or an X-axis and a Y-axis which are perpendicular to each other, a frame-shaped oscillator (26) is disposed to the respective support portions (24) fixed on a substrate (22) through support beams (25) and a columnar electrode (33) is disposed in the oscillator (26) by being fixed to the substrate (22). X-axis displacement sensing units (31) are formed on the right and left sides of the oscillator (26) and Y-axis displacement sensing units (32) are formed to the forward and rearward sides thereof. When an oscillation drive signal is imposed between the oscillator (26) and the columnar electrode (33), an electrostatic attracting force is generated therebetween and the oscillator (26) is oscillated in a Z- axis direction. When an angular velocity ΩY is imposed about the Y-axis at this time, the oscillator (26) is displaced to the X-axis by an Coriolis force and the displacement can be sensed by the X-axis displacement sensing units (31), whereas when an angular velocity ΩX is imposed about the X-axis, the oscillator (26) is displaced to the Y-axis by an Coriolis force and the displacement can be sensed by the Y-axis displacement sensing units (32), so that the angular velocities about the two axes or the X-axis and the Y-axis can be sensed, respectively.

    摘要翻译： 在用于感测彼此垂直的两个轴或X轴和Y轴的角速度的角速度传感器中，框架形振荡器（26）被布置到固定在其上的各个支撑部分（24） 通过支撑梁（25）和柱状电极（33）将基板（22）固定在基板（22）上而配置在振荡器（26）内。 在振荡器（26）的右侧和左侧形成X轴位移感测单元（31），并且Y轴位移感测单元（32）形成在其前侧和后侧。 当在振荡器（26）和柱状电极（33）之间施加振荡驱动信号时，在它们之间产生静电吸引力，并且振荡器（26）在Z轴方向上振荡。 此时，如果绕Y轴施加角速度ΩY，​​则通过科里奥利力使振子26向X轴位移，并且能够通过X轴位移检测部31， 而当关于X轴施加角速度ΩX时，振荡器（26）通过科里奥利力移位到Y轴，并且位移可以由Y轴位移感测单元（32）感测，使得 可以分别感测围绕两个轴或者X轴和Y轴的角速度。