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公开(公告)号：EP0785413A3
公开(公告)日：2000-12-06
申请号：EP97100983.2
申请日：1997-01-22
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： In an angular velocity sensor for sensing angular velocities about two axes or an X-axis and a Y-axis which are perpendicular to each other, a frame-shaped oscillator (26) is disposed to the respective support portions (24) fixed on a substrate (22) through support beams (25) and a columnar electrode (33) is disposed in the oscillator (26) by being fixed to the substrate (22). X-axis displacement sensing units (31) are formed on the right and left sides of the oscillator (26) and Y-axis displacement sensing units (32) are formed to the forward and rearward sides thereof. When an oscillation drive signal is imposed between the oscillator (26) and the columnar electrode (33), an electrostatic attracting force is generated therebetween and the oscillator (26) is oscillated in a Z- axis direction. When an angular velocity ΩY is imposed about the Y-axis at this time, the oscillator (26) is displaced to the X-axis by an Coriolis force and the displacement can be sensed by the X-axis displacement sensing units (31), whereas when an angular velocity ΩX is imposed about the X-axis, the oscillator (26) is displaced to the Y-axis by an Coriolis force and the displacement can be sensed by the Y-axis displacement sensing units (32), so that the angular velocities about the two axes or the X-axis and the Y-axis can be sensed, respectively.
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公开(公告)号：EP0795737A1
公开(公告)日：1997-09-17
申请号：EP97104070.4
申请日：1997-03-11
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： A downsized angular velocity sensor (21) is disclosed in which the detection sensitivity is improved. An oscillator (26) oscillatably supported by support beams along two horizontal axes is formed of two rod-like members (26A) extending along the Y axis and an interconnecting portion (26B). A hollow region is formed between each of the rod-like members (26A) and the interconnecting portion (26B). Displacement detecting sections (34) are disposed in the hollow regions. The displacement detecting sections (34) are each constructed of an antenna-like electrode array (28, 32), so that a greater amount of change in capacitance generated between the antenna-like electrodes (28, 32) can be obtained.
摘要翻译： 公开了一种小型化的角速度传感器（21），其中提高了检测灵敏度。 由沿着Y轴延伸的两个杆状构件（26A）和互连部分（26B）形成由沿着两个水平轴线的支撑梁可摆动地支撑的振荡器（26）。 在每个棒状构件（26A）和互连部分（26B）之间形成中空区域。 位移检测部（34）设置在中空部。 位移检测部分（34）各自由天线状电极阵列（28,32）构成，从而可以获得在天线状电极（28,32）之间产生的更大量的电容变化。
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公开(公告)号：EP0795737B1
公开(公告)日：2003-12-10
申请号：EP97104070.4
申请日：1997-03-11
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
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公开(公告)号：EP0785413B1
公开(公告)日：2002-04-24
申请号：EP97100983.2
申请日：1997-01-22
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
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公开(公告)号：EP0785413A2
公开(公告)日：1997-07-23
申请号：EP97100983.2
申请日：1997-01-22
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： In an angular velocity sensor for sensing angular velocities about two axes or an X-axis and a Y-axis which are perpendicular to each other, a frame-shaped oscillator (26) is disposed to the respective support portions (24) fixed on a substrate (22) through support beams (25) and a columnar electrode (33) is disposed in the oscillator (26) by being fixed to the substrate (22). X-axis displacement sensing units (31) are formed on the right and left sides of the oscillator (26) and Y-axis displacement sensing units (32) are formed to the forward and rearward sides thereof. When an oscillation drive signal is imposed between the oscillator (26) and the columnar electrode (33), an electrostatic attracting force is generated therebetween and the oscillator (26) is oscillated in a Z- axis direction. When an angular velocity ΩY is imposed about the Y-axis at this time, the oscillator (26) is displaced to the X-axis by an Coriolis force and the displacement can be sensed by the X-axis displacement sensing units (31), whereas when an angular velocity ΩX is imposed about the X-axis, the oscillator (26) is displaced to the Y-axis by an Coriolis force and the displacement can be sensed by the Y-axis displacement sensing units (32), so that the angular velocities about the two axes or the X-axis and the Y-axis can be sensed, respectively.
摘要翻译： 在用于感测彼此垂直的两个轴或X轴和Y轴的角速度的角速度传感器中，框架形振荡器（26）被布置到固定在其上的各个支撑部分（24） 通过支撑梁（25）和柱状电极（33）将基板（22）固定在基板（22）上而配置在振荡器（26）内。 在振荡器（26）的右侧和左侧形成X轴位移感测单元（31），并且Y轴位移感测单元（32）形成在其前侧和后侧。 当在振荡器（26）和柱状电极（33）之间施加振荡驱动信号时，在它们之间产生静电吸引力，并且振荡器（26）在Z轴方向上振荡。 此时，如果绕Y轴施加角速度ΩY，则通过科里奥利力使振子26向X轴位移，并且能够通过X轴位移检测部31， 而当关于X轴施加角速度ΩX时，振荡器（26）通过科里奥利力移位到Y轴，并且位移可以由Y轴位移感测单元（32）感测，使得 可以分别感测围绕两个轴或者X轴和Y轴的角速度。
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