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公开(公告)号：EP3730912A1
公开(公告)日：2020-10-28
申请号：EP20170211.5
申请日：2020-04-17
发明人： Chen, Ya-Mei , Hoffman, James
摘要： A force sensor device (10) comprises a sensor die (12) formed from two bonded together silicon members (14, 16). The first member (14) includes a first membrane (24) and a buried cavity (27) beneath the first membrane (24) formed from a recessed section (26) in the second member (14). The second member (16) includes a second membrane (44) formed from a recessed section (32) of an underside surface (34) of the second member (16) that forms a backside cavity (36). The first and second membranes (24, 44) are in vertical alignment with one another. The first member (14) comprises a first set of electrical sensing elements (48) positioned adjacent the first membrane (24), and a second set of electrical sensing elements (54) positioned adjacent the second membrane (44). Electrical contacts (52, 58) are disposed along a surface (18) of the sensor die (12) to facilitate electrical connection with an external device.
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公开(公告)号：EP3730913A1
公开(公告)日：2020-10-28
申请号：EP20170195.0
申请日：2020-04-17
发明人： Chen, Ya-Mei , Hoffman, James
摘要： A sensor assembly (40) comprising a sensor die (42) including a first member (44) and a second member (46). The first member (44) comprises a diaphragm (54) extending between first and second opposed surfaces (50, 48) of the first member (44). A number of electrical sensing elements (58) are disposed within the first member (44) and positioned adjacent the diaphragm (54) along the first surface (50). The second member (46) is attached with the first member (44) along the first surface (50) comprising the electrical sensing elements (58). The second member (46) has a recessed section (75) forming cavity (76) with the first member (44) to accommodate deflection of the diaphragm (54). The first member (44) includes an actuation element (47) that extends outwardly from the second surface (48) and that is positioned directly on the diaphragm (54). The sensor assembly (40) includes metallic connectors (56) and contacts (60) for facilitating connection between the electrical sensing elements (58) and an outer surface (66) of the sensor die to provide a surface mount electrical connection of the sensor assembly (40).
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