公开(公告)号：EP3329508B1

公开(公告)日：2020-11-25

申请号：EP16738441.1

申请日：2016-07-13

Applicant: Microsaic Systems PLC

Inventor： SYMS, Richard

IPC: H01J49/00 ,  H01J49/06

公开(公告)号：EP3329508A1

公开(公告)日：2018-06-06

申请号：EP16738441.1

申请日：2016-07-13

Applicant: Microsaic Systems PLC

Inventor： SYMS, Richard

IPC: H01J49/00 ,  H01J49/06

CPC classification number: H01J49/067 ,  H01J49/0018

Abstract: A method for forming a miniature skimmer cone for a free jet expansion vacuum interface is disclosed. The skimmer cone is formed from electroplated metal, deposited inside a blind hole formed on a silicon substrate. The substrate is partially removed to expose the skimmer cone, together with other features formed by etching, and an outlet orifice is formed. A complete miniature vacuum interface is formed from the stacked assembly of a part containing an inlet orifice, a spacer, and the part containing a skimmer cone described above, mounted in an intermediate pressure chamber at the inlet to a mass spectrometer.