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公开(公告)号:EP2466293B1
公开(公告)日:2014-02-12
申请号:EP11194131.6
申请日:2011-12-16
申请人: Mitutoyo Corporation
发明人: Okabe, Kenji , Nagahama, Tatsuya , Kaneko, Nobuya
CPC分类号: G01N21/64 , G01N21/25 , G02B21/248
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公开(公告)号:EP2466293A1
公开(公告)日:2012-06-20
申请号:EP11194131.6
申请日:2011-12-16
申请人: Mitutoyo Corporation
发明人: Okabe, Kenji , Nagahama, Tatsuya , Kaneko, Nobuya
CPC分类号: G01N21/64 , G01N21/25 , G02B21/248
摘要: In an optical measuring device, the visual observation section 100 includes: a white light source 10 which emits white light; a first objective lens 40 arranged between the white light source 10 and measurement object W, through which the white light emitted from the white light source 10 and return light from the measurement object W transmit; a plurality of tube lenses 50 which change a magnification of the return light passing through the first objective lens 40 to a predetermined magnification; and a lens switching mechanism 60 which can selectively switch the tube lenses 50 so as to select one of the tube lenses 50 to be arranged on the return light, and the special observation section 200 includes: a special light source 110 which emits special light; and a second objective lens 150 arranged between the special light source 110 and measurement object W, through which the special light emitted from the special light source 110 and return light from the measurement object W transmit.
摘要翻译: 在光学测量装置中,目视观察部分100包括:发射白光的白光源10; 配置在白色光源10与被测定物W之间,使从白色光源10射出的白色光和来自测定对象物W的返回光透过的第一物镜40, 多个管透镜50,其将通过第一物镜40的返回光的倍率改变为预定倍率; 以及透镜切换机构60,其可以选择性地切换管透镜50以选择要布置在返回光上的管透镜50中的一个,并且特殊观察部200包括:发出特殊光的特殊光源110; 以及配置在特殊光源110和测定对象W之间的第2物镜150,来自特殊光源110的特殊光和来自测定对象W的返回光透过该第2物镜。
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