MAGNETIC SENSING LEVEL GAUGE
    1.
    发明公开

    公开(公告)号:EP4019913A1

    公开(公告)日:2022-06-29

    申请号:EP20856630.7

    申请日:2020-08-18

    IPC分类号: G01F23/22

    摘要: A wall-mounted magnetic level gauge for material storage containers, the magnetic level gauge comprises: A magnetic displacement assembly (101), which is located on the sidewall of the material storage container and generates a mechanical displacement in response to the level of a material in the material storage container. It further includes a magnetic sensor assembly (2), comprising a protective housing (108), a magnetoresistive chip (103), and a processing module (2a) located within the protective housing (108). The protective housing (108) is fixed on the side wall of the material storage container. The magentoresistive chip (103) is located at a side of the processing module (2a) facing a magnet displacement assembly (101). The magnetic sensor assembly (2) is used to sense a magnetic field produced by the magnet displacement assembly (101) to determine the level of the material in the material storage container. The magnet displacement assembly (101) displaces the magnet according to the level of the material. The magnetoresistive chip senses a magnetic field change of the magnet displacement assembly (101) to determine the level of the material accordingly. The magnetic level gauge has the advantages of simple structure, low power consumption, high sensitivity, and low cost. It is suitable for the solid and liquid material measurement.

    HIGH-SENSITIVITY MAGNETORESISTIVE ACOUSTIC WAVE SENSOR AND ARRAY DEVICE

    公开(公告)号:EP4024015A1

    公开(公告)日:2022-07-06

    申请号:EP20857882.3

    申请日:2020-08-18

    IPC分类号: G01H11/02

    摘要: A magnetoresistive acoustic wave sensor with high sensitivity and an array device thereof is disclosed, in which a magnetoresistive acoustic wave sensor comprises a protective tube shell (106), a magnetic vibration assembly (101), and a magnetoresistive chip (102) located inside the protective tube shell (106). The protective tube shell (106) comprises at least one opening which is covered by the magnetic vibration assembly (101). The plane where the magnetoresistive sensor chip (102) is located is perpendicular to the plane where the magnetic vibration assembly (101) is located, and the sensing direction of the magnetoresistive sensor chip (102) is located in the plane where magnetoresistive sensor chip (102) is located, and is perpendicular to or parallel to the plane where the magnetic vibration assembly (101) is located. Alternatively, the plane where the magnetoresistive sensor chip (102) is located is parallel to the plane where the magnetic vibration assembly (101) is located, and the sensing direction of the magnetoresistive sensor chip (102) is located in the plane where the magnetoresistive sensor chip (102) is located, and is parallel to the plane where the magnetic vibration assembly (101) is located. The magnetoresistive acoustic wave sensor with high sensitivity and an array device thereof is of small size, high sensitivity, low power consumption, high response speed, good stable temperature, large response frequency bandwidth, excellent low-frequency response and the like.

    MEMS ENVIRONMENTAL SENSOR AND PREPARATION METHOD THEREFOR

    公开(公告)号:EP4137783A1

    公开(公告)日:2023-02-22

    申请号:EP21788421.2

    申请日:2021-04-15

    IPC分类号: G01D5/14 B81B7/02 B81C1/00

    摘要: The disclosed invention is a MEMS environmental sensor and preparation method thereof. A transfer cavity is produced in the middle of a transfer substrate of a MEMS environmental sensor, and a transfer medium is located inside the transfer cavity. The surface area of an input port is larger than the surface area of an output port. An elastic transfer membrane is provided on the surface of the input port, and an elastic pressure membrane is provided on the surface of the output port. A load bearing cavity is provided in a load bearing substrate, a magnetic sensing element is positioned inside the load bearing cavity, and the load bearing cavity partially overlaps with the output port. The surface area of the input port of the transfer cavity is larger than the surface area of the output port, and on the basis of Pascal's principle, differences in the volume of the transmission cavity are used to transform a small displacement in a region of large volume into a large displacement in a region of small volume. In addition, because the output port and the end of the output port at least partially overlap, and a magnetic sensing element is arranged in the load bearing cavity, a change in displacement is produced, producing a change in a magnetic field, that is converted into a change in electrical resistance, which provides high-sensitivity and low-power detection.

    CAPILLARY CHANNEL ENVIRONMENTAL SENSOR AND PREPARATION METHOD THEREFOR

    公开(公告)号:EP4137782A1

    公开(公告)日:2023-02-22

    申请号:EP21787928.7

    申请日:2021-04-15

    IPC分类号: G01D5/14

    摘要: Disclosed in the present invention are a capillary channel environmental sensor and a preparation method therefor. The capillary channel environmental sensor comprises a transfer cavity and at least one capillary channel. The cross sectional area of the transfer cavity is greater than the cross sectional area of the capillary channel, and one end of the capillary channel is connected with the transfer cavity; an elastic transfer diaphragm is provided between the transfer cavity and an external measurement environment. A positioned droplet is provided in the interior of the capillary channel, the positioned droplet is in tight contact with the inner walls of the capillary channel and the positioned droplet is in tight contact with a transfer medium. By means of the transfer cavity and the capillary channel that are connected to one another, because the cross sectional area of the transfer cavity is larger than the cross sectional area of the capillary channel, differences in volume between the transfer cavity and the capillary channel are used to transform a small displacement in a region of large volume into a large displacement in a region of small volume. Because the positioned droplet is provided in the capillary channel, and the capillary channel environmental sensor comprises a magnetic sensing element, the magnetic sensing element causes, on the basis of movement of the positioned droplet, the change in displacement through an intermediate variable to provide high-sensitivity and low-power detection.

    MAGNETORESISTIVE INERTIAL SENSOR CHIP
    5.
    发明公开

    公开(公告)号:EP3954972A1

    公开(公告)日:2022-02-16

    申请号:EP20784217.0

    申请日:2020-03-27

    IPC分类号: G01D5/16

    摘要: This invention describes a magnetoresistive inertial sensor chip, comprising a substrate (101), a vibrating diaphragm (102, 102'), a magnetic field sensing magnetoresistor (105) and at least one permanent magnet thin film (108). The vibrating diaphragm (102, 102') is located on one side surface of the substrate (101). The magnetic field sensing magnetoresistor (105) and the permanent magnet thin film (108) are set on the surface of the vibrating diaphragm (102, 102') displaced from the base of the substrate (101). A contact electrode (106) is also arranged on the surface of the vibrating diaphragm (102, 102') away from the base of the substrate (101). The magnetic field sensing magnetoresistor (105) is connected to the contact electrode (106) through a lead (104). The substrate (101) comprises a cavity (103) formed through etching and either one or both of the magnetic field sensing magnetoresistors (105) and the permanent magnet thin film (108) are arranged in a vertical projection area of the cavity (103) in the vibrating diaphragm portion (102, 102'). A magnetic field generated by the permanent magnet thin film (108) changes in the sensing direction of the magnetic field sensing magnetoresistor (105) of magnetoresistive inertial sensor chip, which changes the resistance valve of the magnetic field sensing magnetoresistor (105), thereby producing a change in an output electrical signal. This magnetoresistive inertial sensor chip uses the high-sensitivity and high-frequency response characteristics of a magnetoresistor to improve the output signal strength and frequency response, thereby facilitating the detection of small and high frequency pressure, vibration, or acceleration changes.