公开(公告)号：EP3862742A1

公开(公告)日：2021-08-11

申请号：EP19869892.0

申请日：2019-09-30

申请人： NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  RION Co., Ltd. ,  Kioxia Corporation

发明人： KATO, Haruhisa ,  MATSUURA, Yusuke ,  NAKAMURA, Ayako ,  KONDO, Kaoru ,  TABUCHI, Takuya ,  TOMITA, Hiroshi ,  HAYASHI, Hidekazu

IPC分类号： G01N15/02 ,  G01N15/00

摘要： To easily calibrate, using a calibration particle, a measuring device configured to capture an image of a target object such as a target particle. An image analyzer (21) acquires multiple images obtained at a predetermined time interval Δt, (a) specifies the mean-square displacement Δ MS-cal of a bright point of a calibration particle based on the displacement, in terms of a pixel unit, of the bright point of the calibration particle in the multiple images in a calibration mode, and (b) specifies the mean-square displacement Δ MS of a bright point of the target particle based on the displacement, in terms of the pixel unit, of the bright point of the target particle in the multiple images in a measuring mode. A particle size analyzer (22), (c) in the analysis mode, derives the particle size d of the target particle from the mean-square displacement Δ MS of the bright point of the target particle based on the mean-square displacement Δ MS-cal of the bright point of the calibration particle and the particle size d cal of the calibration particle.