Abstract:
A humidity-sensitive porous layer (13) of a humidity-sensitive element section (3) of a humidity sensor (1) is formed of a crystalline phase oxide grains such as Al 2 O 3 -SnO 2 -TiO 2 and of a glass phase such as silicate glass covering the crystalline phase. The glass phase contains an alkali metal oxide and/or alkaline earth metal oxide such as Li 2 O. The humidity sensitive porous layer (13) assumes a skeletal structure that is formed of crystalline phase oxide grains covered or coated with the glass phase. A heater (17) of the humidity sensor is controlled to heat the humidity-sensitive element section (3) at a temperature ranging from 500°C to 800°C so as to clean off the humidity-sensitive element section while an internal combustion engine is running and exhausting fouling substances. Measurement of Humidity in an exhaust gas exhausted from an exhaust gas purifying apparatus of an internal combustion engine is carried out by using the humidity sensor (1), so long as the exhaust gas temperature does not exceed 100°C regardless of whether or not the engine is running.
Abstract:
A humidity-sensitive porous layer (13) of a humidity-sensitive element section (3) of a humidity sensor (1) is formed of a crystalline phase oxide grains such as Al 2 O 3 -SnO 2 -TiO 2 and of a glass phase such as silicate glass covering the crystalline phase. The glass phase contains an alkali metal oxide and/or alkaline earth metal oxide such as Li 2 O. The humidity sensitive porous layer (13) assumes a skeletal structure that is formed of crystalline phase oxide grains covered or coated with the glass phase. A heater (17) of the humidity sensor is controlled to heat the humidity-sensitive element section (3) at a temperature ranging from 500°C to 800°C so as to clean off the humidity-sensitive element section while an internal combustion engine is running and exhausting fouling substances. Measurement of Humidity in an exhaust gas exhausted from an exhaust gas purifying apparatus of an internal combustion engine is carried out by using the humidity sensor (1), so long as the exhaust gas temperature does not exceed 100°C regardless of whether or not the engine is running.
Abstract:
A gas sensor (1; 101; 201) comprising a substrate (15), a gas-sensitive layer (4; 104; 204) formed on the substrate (5) and containing a metal-oxide semiconductor that varies in electrical characteristics depending upon a variation of a concentration of a particular gas component in a gas mixture to be detected, as a major constituent, an insulating adhesive layer (7; 107; 207) provided on the substrate (5) and in contact with the gas-sensitive layer (4; 104; 204), and a detecting electrode (6; 106; 206) provided on the substrate (15) for detecting a variation of the electrical characteristics of the gas-sensitive layer (4; 104; 204), wherein all of a surface of the detecting electrode (6; 106; 206) on the side facing the gas-sensitive layer 84; 104; 204) is abuttingly engaged with the gas-sensitive layer (4; 104; 204).