公开(公告)号：EP1102071A4

公开(公告)日：2005-11-09

申请号：EP99931514

申请日：1999-07-23

Applicant: NHK SPRING CO LTD

Inventor： KUDO MASAMI ,  KAZAMA TOSHIO ,  YAMADA YOSHIO ,  WATANABE KAZUSHI

IPC: G01R31/26 ,  G01R1/067 ,  G01R1/073 ,  G01R3/00 ,  G01R31/02 ,  H01L21/00 ,  H01L21/66

CPC classification number: H01L21/67242 ,  G01R1/067

Abstract: A holder of an electroconductive contactor comprises a silicon wafer having a multilayer structure in which a silicon oxide film having a thickness of, say, around 1 mu m is formed between first and second silicon layers. A small-diameter hole for guiding the head of an electroconductive needle body is made in the first silicon layer, and a large-diameter hole for receiving a flange portion of the needle body and a helical compression spring is made in the second silicon layer. A stopper against which the flange portion is struck is formed with a silicon oxide layer. The surface of the first silicon layer is machined, for example, lapped, and therefore the projection of the needle body is restricted with high precision. Since the holder is made of the same material as that of an object to be measured and therefore the thermal expansion coefficients thereof are the same, the relative positions of needle bodies are not displaced even under a test in a high-temperature atmosphere when the silicon wafer is inspected by multi-point measurement.

Abstract translation: 根据本发明的用于导电接触单元的保持器使用具有层叠结构的硅晶片，其包括设置在两个硅层之间的第一硅层，第二硅层和氧化硅膜。 在第一硅层中形成一个小孔，用于同轴且可滑动地引导导电针构件的头部，并且在第二硅层中形成大孔，用于容纳针构件的凸缘部分和压缩螺旋弹簧 氧化硅膜用作凸缘构件的止动件。 因此，通过研磨完成第一硅层的表面，可以高精度地限定导电针构件的突出长度。 当要测试的对象由硅晶片组成时，由于保持器由与待测试对象相同的材料制成，并且它们经历基本上相同的热膨胀，所以每个导电针构件不会同时进入位置移动 多个点。