公开(公告)号：EP1811327A4

公开(公告)日：2008-07-30

申请号：EP05800551

申请日：2005-11-04

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI

IPC: G02B17/06 ,  G02B13/18

CPC classification number: G03F7/70233 ,  G02B13/18 ,  G02B17/0657 ,  G03F7/70275

Abstract: A projection optical system has eight reflecting mirrors and is adapted to form a reduced image of a first surface on a second surface. The projection optical system has a first imaging catoptric system (G1) for forming an intermediate image of the first surface, and a second imaging catoptric system (G2) for forming an image of the intermediate image on the second surface. The first imaging catoptric system has a first reflecting mirror (M1 ), a second reflecting mirror (M2), a third reflecting mirror (M3), and a fourth reflecting mirror (M4) in an order of incidence of light from the first surface side. The second imaging catoptric system has a fifth reflecting mirror (M5), a sixth reflecting mirror (M6), a seventh reflecting mirror (M7), and an eighth reflecting mirror (M8) in an order of incidence of light from the first surface side. At least one reflecting surface among the eight reflecting mirrors is comprised of a spherical surface.

公开(公告)号：EP1860477A4

公开(公告)日：2008-08-20

申请号：EP06713513

申请日：2006-02-10

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI

IPC: G02B17/06 ,  G03F7/20 ,  H01L21/027

CPC classification number: G03F7/70233 ,  G02B17/0657 ,  G03F7/70275

Abstract: A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The projection optical system comprises, for example, eight reflecting mirrors (M1 to M8) and forms a reduced image of a first surface (4) on a second surface (7). The projection optical system comprises a first reflecting image forming optical system (G1) which forms a first intermediate image (IMI1) of the first surface based on light from the first surface, a second reflecting image forming optical system (G2) which forms a second intermediate image (M2) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G3) which forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M6 to M8) which the third reflecting image forming optical system comprises is greater than the number of reflecting mirrors (M1, M2) which the first reflecting image forming optical system comprises.

公开(公告)号：EP1336887A4

公开(公告)日：2008-07-09

申请号：EP01976807

申请日：2001-10-23

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI

IPC: G02B13/18 ,  G02B13/22 ,  G02B17/08 ,  G03F7/20 ,  G03F7/22 ,  H01L21/027

CPC classification number: G02B17/0892 ,  G02B17/0844 ,  G03F7/70225 ,  G03F7/70275

Abstract: A catadioptric system includes: a first image forming optical system that includes at least two reflecting mirrors and forms a first intermediate image of a first plane with light originating from the first plane; a second image forming optical system that includes at least two reflecting mirrors and forms a second intermediate image of the first plane with light having traveled via the first image forming optical system; and a refractive type of third image forming optical system that forms a final image of the first plane onto a second plane with light having traveled via the second image forming optical system, and optical members constituting the first image forming optical system, the second image forming optical system and the third image forming optical system are all disposed along a single linear optical axis.

公开(公告)号：EP1701194A4

公开(公告)日：2008-07-16

申请号：EP04807454

申请日：2004-12-21

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI

IPC: G02B17/00 ,  G02B17/06 ,  G02B13/24 ,  G03F7/20 ,  H01L21/027

CPC classification number: G03F7/70233 ,  G02B17/0663 ,  G03F7/70275

Abstract: A projection optical system comprises eight reflectors and forms a reduced image of a first surface (4) onto a second surface (7). It comprises a first reflective imaging optical system (G1) for forming an intermediate image of the first surface and a second reflective imaging optical system (G2) for forming an image of the intermediate image onto the second surface. The first reflective imaging optical system includes a first reflector (M1), a second reflector (M2) equipped with an aperture stop (AS), a third reflector (M3), and a fourth reflector (M4) successively as light enters from the first surface side. The second reflective imaging optical system includes a fifth reflector (M5), a sixth reflector (M6), a seventh reflector (M7), and an eighth reflector (M8) successively as light enters from the first surface side. This realizes a reflective projection optical system which can favorably correct aberrations while having a favorable reflection characteristic with respect to X-rays and keeping the reflectors from becoming bulky.

公开(公告)号：EP1079253A4

公开(公告)日：2004-09-01

申请号：EP99912115

申请日：1999-04-06

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI ,  TSUKAMOTO HIROYUKI

IPC: G02B17/08 ,  G03F7/20 ,  G02B13/14 ,  G02B13/18 ,  H01L21/027

CPC classification number: G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70241 ,  G03F7/70358 ,  G03F7/70958

Abstract: A projection exposure apparatus has an illumination optical system 3 for illuminating a mask 4 formed with a pattern with beams of radiation, and a projection optical system 7 for forming an image of the pattern on a workpiece 8 on the basis of radiation from the mask. The illumination optical system supplies an illumination radiation having a center wavelength of 180 nm or smaller, and the projection optical system includes at least one concave mirror, fifteen or less pieces of refracting lenses, and four or more aspherical surfaces.

公开(公告)号：EP2000840A4

公开(公告)日：2009-07-29

申请号：EP07737991

申请日：2007-03-08

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI

IPC: G02B17/06 ,  G03F7/20 ,  H01L21/027

CPC classification number: G02B27/0043 ,  G02B17/0657 ,  G03F7/70233

Abstract: A projection optical system, which has a relatively large image side numerical aperture of, for instance, 0.45 or larger, and can inspect the surface-shape error of a reflection surface with a prescribed accuracy. The projection optical system is provided with a first reflecting image-forming optical system (G1) for forming an intermediate image of a first surface based on light from a first surface (4), and a second reflecting image-forming optical system (G2) for forming a reduced image on a second surface (7) based on light from the intermediate image. The first reflecting image-forming optical system (G1) is provided with a first concave reflective mirror (M1), a second convex reflective mirror (M2), a third reflective mirror (M3) and a fourth concave reflective mirror (M4). The second reflecting image-forming optical system (G2) is provided with a fifth concave reflective mirror (M5), a sixth reflective mirror (M6), a seventh convex reflective mirror (M7) and an eighth concave reflective mirror (M8) . The conditions of 1

公开(公告)号：EP1768172A4

公开(公告)日：2008-03-05

申请号：EP05753442

申请日：2005-06-22

Applicant: NIPPON KOGAKU KK ,  CANON KK

Inventor： KOMATSUDA HIDEKI ,  TAKAHASHI TOMOWAKI ,  SUZUKI MASAYUKI

IPC: H01L21/027 ,  G03F7/20

CPC classification number: G03F7/7025 ,  G03F7/70233

Abstract: A projection optical system is a catoptric system in which a field of view region and an imaging region are located spaced from an optical axis, in which a numerical aperture of light reaching each point on an image plane is substantially uniform regardless of an image height and a direction. An aperture stop for defining the numerical aperture of the projection optical system is provided, and the aperture stop is provided with an aperture portion in a predetermined shape in which the numerical aperture of light reaching each point within a predetermined region is substantially over the predetermined region, that is, in a shape in which dimensions concerning two directions perpendicular to each other are different from each other. A predetermined shape of the aperture portion is defined so as to compensate for the effect of non-uniformity of the numerical aperture of light reaching each point within a predetermined region due to a partial optical system arranged between the aperture stop and an image plane not satisfying a desired projective relationship.

公开(公告)号：EP0869383A2

公开(公告)日：1998-10-07

申请号：EP98105955

申请日：1998-04-01

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI

IPC: G02B17/08 ,  G03F7/20

CPC classification number: G02B17/0892 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

Abstract: In a catadioptric optical system, the first focusing lens system A includes a concave mirror Mc, and it forms an intermediate image of the first plane R. The second focusing lens system B includes an aperture stop AS, and it forms a refocused image of the intermediate image on the second plane W. A reflecting surface MP1 is placed so that the light flux leaving the first focusing lens system A is guided to the second focusing lens system B. There are one or more lens surfaces that satisfy the condition and one or more lens surfaces that satisfy the condition where h is the height at each lens surface of the light beam that is assumed to be emitted from the intersection of the optical axis of the first plane and passes through the lens surfaces with the maximum numerical aperture, and phi is the radius of the diaphragm of the aperture stop. At least one of the lens surfaces that satisfy condition (1) and at least one of the lens surfaces that satisfy condition (2) are aspheric. The first aspheric element is placed near the intermediate image, while the second aspheric element is placed near the concave mirror or the aperture stop. The concave mirror itself may be formed as a second aspheric element.