公开(公告)号：EP2381286B1

公开(公告)日：2018-04-04

申请号：EP11151597.9

申请日：2011-01-20

Applicant: Raytheon Company

Inventor： Cook, Lacy G.

IPC: G02B17/06

CPC classification number: G02B17/0657

Abstract: A wide-field-of-view (WFOV) optical system includes a negative optical-power primary mirror configured to receive and reflect light from an image scene; a low optical-power secondary mirror configured to receive and reflect light from the primary mirror; a negative optical-power tertiary mirror configured to receive and reflect light from the secondary mirror; and a positive optical-power quaternary mirror configured to receive and reflect light from the tertiary mirror. The primary, secondary, tertiary and quaternary mirrors are configured to maintain an effective focal length (EFL) at edges of the field of view (FOV) of the optical system to be at least equal to a center of the FOV of the optical system so that a spatial resolution of the optical system essentially remains constant across the FOV.

公开(公告)号：EP2169465A1

公开(公告)日：2010-03-31

申请号：EP09013507.0

申请日：2006-05-10

Applicant: Carl Zeiss SMT AG

Inventor： Mann, Hans-Jürgen

IPC: G03F7/20 ,  G02B17/06

CPC classification number: G02B17/0657 ,  G03F7/70233

Abstract: The invention relates to projection system for guiding light with wavelengths ≤ 193 nm, from an object plane to an image plane,
comprising at least a first mirror, a second mirror, a third mirror, a fourth mirror (M4), a fifth mirror (M5) and a sixth mirror centered around an optical axis (HA) and arranged along the optical axis, with the light traveling form the object plane to the first mirror, then from the first mirror to the second mirror, then from the second mirror to the third mirror, then from the third mirror to the fourth mirror, then form the fourth mirror to the fifth mirror and then form the fifth mirror to the the sixth mirror , characterized in that the third mirror, the fourth mirror and the sixth mirror are arranged along the optical axis geometrically between the first mirror and the second mirror.

Abstract translation: 本发明涉及一种投影系统，用于引导从物体平面到像平面波长193nm的光，其包括至少第一反射镜，第二镜，第三镜，第四镜（M4），第五镜 （M5）和以光轴（HA）为中心并沿着光轴布置的第六镜，其中光从物平面移动到第一镜，然后从第一镜到第二镜，然后从第二镜 然后从第三镜到第四镜，然后形成第四镜到第五镜，然后形成第五镜到第六镜，其特征在于，第三镜，第四镜和第六镜 沿几何方向沿着光轴布置在第一反射镜和第二反射镜之间。

公开(公告)号：EP1811327A4

公开(公告)日：2008-07-30

申请号：EP05800551

申请日：2005-11-04

Applicant: NIPPON KOGAKU KK

Inventor： TAKAHASHI TOMOWAKI

IPC: G02B17/06 ,  G02B13/18

CPC classification number: G03F7/70233 ,  G02B13/18 ,  G02B17/0657 ,  G03F7/70275

Abstract: A projection optical system has eight reflecting mirrors and is adapted to form a reduced image of a first surface on a second surface. The projection optical system has a first imaging catoptric system (G1) for forming an intermediate image of the first surface, and a second imaging catoptric system (G2) for forming an image of the intermediate image on the second surface. The first imaging catoptric system has a first reflecting mirror (M1 ), a second reflecting mirror (M2), a third reflecting mirror (M3), and a fourth reflecting mirror (M4) in an order of incidence of light from the first surface side. The second imaging catoptric system has a fifth reflecting mirror (M5), a sixth reflecting mirror (M6), a seventh reflecting mirror (M7), and an eighth reflecting mirror (M8) in an order of incidence of light from the first surface side. At least one reflecting surface among the eight reflecting mirrors is comprised of a spherical surface.

公开(公告)号：EP1811327A1

公开(公告)日：2007-07-25

申请号：EP05800551.3

申请日：2005-11-04

Applicant: NIKON CORPORATION

Inventor： TAKAHASHI, Tomowaki, c/o NIKON CORPORATION

IPC: G02B17/00

CPC classification number: G03F7/70233 ,  G02B13/18 ,  G02B17/0657 ,  G03F7/70275

Abstract: A projection optical system has eight reflecting mirrors and is adapted to form a reduced image of a first surface on a second surface. The projection optical system has a first imaging catoptric system (G1) for forming an intermediate image of the first surface, and a second imaging catoptric system (G2) for forming an image of the intermediate image on the second surface. The first imaging catoptric system has a first reflecting mirror (M1 ), a second reflecting mirror (M2), a third reflecting mirror (M3), and a fourth reflecting mirror (M4) in an order of incidence of light from the first surface side. The second imaging catoptric system has a fifth reflecting mirror (M5), a sixth reflecting mirror (M6), a seventh reflecting mirror (M7), and an eighth reflecting mirror (M8) in an order of incidence of light from the first surface side. At least one reflecting surface among the eight reflecting mirrors is comprised of a spherical surface.

Abstract translation: 一种投影光学系统，具有八个反射镜，是angepasst上形成的第二表面的第一表面的缩小图像。 的投影光学系统具有用于在所述第一表面的中间图像形成第一成像反射系统（G1），以及用于在第二表面上形成中间图像的图像的第二成像反射系统（G2）。 第一成像反射光学系统具有第一反射镜（M1），第二反射镜（M2），第三反射镜（M3），以及在光的入射的顺序从第一表面侧的第四反射镜（M4） ， 第二成像反射系统具有第五反射镜（M5），在光的入射顺序的第六反射镜（M6），第七反射镜（M7），以及第八反射镜（M8）从所述第一面侧 ， 八个反射镜中的至少一个反射面由球面的。

公开(公告)号：EP1335228B1

公开(公告)日：2006-01-11

申请号：EP03250720.4

申请日：2003-02-05

Applicant: CANON KABUSHIKI KAISHA

Inventor： Terasawa, Chiaki,Canon Kabushiki Kaisha

IPC: G02B17/06 ,  G02B13/14 ,  G03F7/20

CPC classification number: G03F7/70233 ,  G02B17/0652 ,  G02B17/0657 ,  G03F7/70275

公开(公告)号：EP1513019A2

公开(公告)日：2005-03-09

申请号：EP04020761.5

申请日：2004-09-01

Applicant: CANON KABUSHIKI KAISHA

Inventor： Sasaki, Takahiro

IPC: G03F7/20

CPC classification number: G02B17/0657 ,  G03F7/70233 ,  G03F7/70275

Abstract: There is provided a projection optical system for projecting a pattern on an object surface onto an image surface in a reduced size. The projection optical system includes six reflective surfaces that includes, in order of reflecting light from the object surface, a first reflective surface, a second convex reflective surface, a third convex reflective surface, a fourth reflective surface, a fifth reflective surface and a sixth reflective surface, and an aperture stop along an optical path between the first and second reflective surfaces.

Abstract translation: 提供了一种用于将物体表面上的图案以减小的尺寸投影到图像表面上的投影光学系统。 投影光学系统包括六个反射表面，其以从物体表面反射光的顺序包括第一反射表面，第二凸反射表面，第三凸反射表面，第四反射表面，第五反射表面和第六反射表面 反射表面和沿着第一和第二反射表面之间的光路的孔径光阑。

公开(公告)号：EP1005664B1

公开(公告)日：2004-11-17

申请号：EP99914692.1

申请日：1999-04-22

Applicant: Koninklijke Philips Electronics N.V.

Inventor： BRAAT, Josephus, J., M.

IPC: G02B17/06 ,  G03F7/20

CPC classification number: G03F7/70233 ,  G02B17/0657 ,  G03F7/70275 ,  G03F7/70358

Abstract: A mirror projection system for use in a step-and-scan lithographic projection apparatus, in which a mask pattern (15) is repetitively scan-imaged on a number of areas of a substrate (20) by means of a beam (b) of EUV radiation having a cross section shaped as a segment of a ring, has six imaging mirrors (5-10). The design is such that no intermediate image is formed and the system has a negative magnification. When using this projection system in a scanning apparatus, the mask and the substrate move in opposite directions during scanning, which is advantageous from a mechanical point of view.

公开(公告)号：EP0929834B1

公开(公告)日：2004-03-17

申请号：EP98928390.8

申请日：1998-05-29

Applicant: SAGEM S.A.

Inventor： GEYL, Roland

IPC: G02B17/06 ,  G02B23/06

CPC classification number: G02B17/0657

公开(公告)号：EP1335228A1

公开(公告)日：2003-08-13

申请号：EP03250720.4

申请日：2003-02-05

Applicant: CANON KABUSHIKI KAISHA

Inventor： Terasawa, Chiaki,Canon Kabushiki Kaisha

IPC: G02B17/06 ,  G02B13/14 ,  G03F7/20

CPC classification number: G03F7/70233 ,  G02B17/0652 ,  G02B17/0657 ,  G03F7/70275

Abstract: A cataoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first, second, third and fourth mirrors serving substantially as a coaxial system so as to sequentially reflect light from an object side to an image side, and being arranged so that light from the object surface to the first mirror may intersect light from the second mirror to the third mirror.

Abstract translation: 用于将物体表面上的图案投影到图像表面上并用作形成中间图像的成像系统的计算投影光学系统包括基本上用作同轴系统的第一，第二，第三和第四反射镜，以顺序地反射光 从物体侧到图像侧，并且被布置成使得从物体表面到第一反射镜的光可以与从第二反射镜到第三反射镜的光相交。

公开(公告)号：EP1282011A2

公开(公告)日：2003-02-05

申请号：EP02016693.0

申请日：2002-07-26

Applicant: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG

Inventor： Mann, Hans-Jürgen ,  Ulrich, Wilhelm ,  Hudyma, Russel M.

IPC: G03F7/20 ,  G02B17/06

CPC classification number: G03F7/70233 ,  G02B5/0891 ,  G02B5/10 ,  G02B17/0657 ,  G03F7/70958

Abstract: Ein Projektionsobjektiv zur Abbildung eines in einer Objektebene angeordneten Musters in eine Bildebene mit Hilfe von elektromagnetischer Strahlung aus dem extremen Ultraviolettbereich (EUV) hat zwischen Objektebene und Bildebene mehrere mit Reflexbeschichtungen versehene, abbildende Spiegel, die eine optische Achse des Projektionsobjektiv definieren. Mindestens einer der Spiegel hat eine gradierte Reflexbeschichtung mit einem zu einer Beschichtungsachse rotationssymmetrischen Schichtdickenverlauf, wobei die Beschichtungsachse exzentrisch zur optischen Achse des Projektionsobjektiv angeordnet ist. Die Bereitstellung mindestens einer dezentrierten, gradierten Reflexbeschichtung ermöglicht die Konstruktion von Projektionsobjektiven, die bei hoher Gesamttransmission eine gute Gleichmäßigkeit der Feldausleuchtung erlauben.

Abstract translation: 该设备使用极紫外线范围的电磁辐射。 在物体和图像平面之间提供的具有反射涂层的成像反射镜定义了投影物镜的光轴。 至少一个反射镜具有分散的渐变反射涂层，其厚度轮廓与偏心于光轴的涂覆轴线对称旋转。