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公开(公告)号：EP0249235B1
公开(公告)日：1993-09-08
申请号：EP87108476.0
申请日：1987-06-12
发明人： Sano, Kazuo c/o Patent & License , Miyazaki, Takao c/o Patent & License , Yamada, Yoshiro c/o Patent & License
CPC分类号： G01B11/065 , G01N21/211
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公开(公告)号：EP0249235A3
公开(公告)日：1989-03-15
申请号：EP87108476.0
申请日：1987-06-12
发明人： Sano, Kazuo c/o Patent & License , Miyazaki, Takao c/o Patent & License , Yamada, Yoshiro c/o Patent & License
CPC分类号： G01B11/065 , G01N21/211
摘要： A linearly polarized light beam is applied to the surface of a film (9b) and is reflected therefrom. The beam is then split into three light beams by three or four optical flats (13a - 13d). These light beams are applied to photoelectric conversion devices (18a - 18c) after passing through analyzers (14a - 14c) with fixed analyzing angles. The photoelectric conversion devices convert the beams into electric signals representing the intensities of these light beams. Two ellipsometric parameters ψ and Δ are calculated from these three electric signals.
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公开(公告)号：EP0249235A2
公开(公告)日：1987-12-16
申请号：EP87108476.0
申请日：1987-06-12
发明人： Sano, Kazuo c/o Patent & License , Miyazaki, Takao c/o Patent & License , Yamada, Yoshiro c/o Patent & License
CPC分类号： G01B11/065 , G01N21/211
摘要： A linearly polarized light beam is applied to the surface of a film (9b) and is reflected therefrom. The beam is then split into three light beams by three or four optical flats (13a - 13d). These light beams are applied to photoelectric conversion devices (18a - 18c) after passing through analyzers (14a - 14c) with fixed analyzing angles. The photoelectric conversion devices convert the beams into electric signals representing the intensities of these light beams. Two ellipsometric parameters ψ and Δ are calculated from these three electric signals.
摘要翻译： 将线偏振光束施加到膜（9b）的表面并从其反射。 然后将光束通过三个或四个光学平面（13a-13d）分成三个光束。 这些光束通过具有固定分析角度的分析器（14a-14c）后被施加到光电转换装置（18a-18c）。 光电转换装置将光束转换成表示这些光束强度的电信号。 从这三个电信号计算出两个椭偏参数psi和DELTA。
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