公开(公告)号：EP1351089A2

公开(公告)日：2003-10-08

申请号：EP03090062.5

申请日：2003-03-14

申请人： Nippon Telegraph and Telephone Corporation

发明人： Ishii, Hiromu, c/o NTT Intellectual Prop. Center ,  Tanaba, Yasuyuki, c/o NTT Intell. Prop. Center ,  Machida, Katsuyuki, c/o NTT Intell. Prop. Center ,  Urano, Masami, c/o NTT Intell. Prop. Center ,  Shimamura, Toshishige, c/o NTT Intell. Prop. Ctr. ,  Uenishi, Yuji, c/o NTT Intell. Prop. Ctr. ,  Kiyokura, Takanori, c/o NTT Intell. Prop. Ctr.

IPC分类号： G02B26/08 ,  G02B6/35

CPC分类号： G02B6/3584 ,  B81B3/0043 ,  B81B2201/042 ,  B81B2203/0384 ,  B81B2203/04 ,  B81C1/00103 ,  B81C1/00246 ,  B81C2203/0735 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/357

摘要： An optical switch device includes at least an optical switch element and driving control circuit (150). In the optical switch element, a fixed electrode portion (140) is arranged, via a dielectric layer (102), on a semi-conductor substrate (101) on which an integrated circuit is formed. A mirror structure (130, 131, 132) has a plate-shaped movable portion (131, 132) arranged above the fixed electrode portion which opposing the fixed electrode portion. A reflecting portion (131) is formed at least at part of the movable portion to reflect light. A support member (120) is fixed around the fixed electrode portion on the semiconductor substrate via a dielectric layer (102) and supports the mirror structure. The driving control circuit is incorporated in the integrated circuit to drive the optical switch element by applying a predetermined potential to the movable portion and fixed electrode portion.

摘要翻译： 光开关装置至少包括光开关元件和驱动控制电路（150）。 在光开关元件中，固定电极部（140）经由电介质层（102）配置在形成有集成电路的半导体基板（101）上。 反射镜结构（130,131,132）具有布置在与固定电极部分相对的固定电极部分上方的板状可动部分（131,132）。 反射部分（131）至少形成在可动部分的一部分以反射光。 支撑构件（120）经由电介质层（102）固定在半导体衬底上的固定电极部分周围，并支撑反射镜结构。 驱动控制电路结合在集成电路中，通过向可动部分和固定电极部分施加预定电位来驱动光开关元件。

公开(公告)号：EP1351089B1

公开(公告)日：2007-01-24

申请号：EP03090062.5

申请日：2003-03-14

申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION

发明人： Ishii, Hiromu, c/o NTT Intellectual Prop. Center ,  Tanabe, Yasuyuki, c/o NTT Intell. Prop. Center ,  Machida, Katsuyuki, c/o NTT Intell. Prop. Center ,  Urano, Masami, c/o NTT Intell. Prop. Center ,  Shimamura, Toshishige, c/o NTT Intell. Prop. Ctr. ,  Uenishi, Yuji, c/o NTT Intell. Prop. Ctr. ,  Kiyokura, Takanori, c/o NTT Intell. Prop. Ctr.

IPC分类号： G02B6/35 ,  G02B26/08

CPC分类号： G02B6/3584 ,  B81B3/0043 ,  B81B2201/042 ,  B81B2203/0384 ,  B81B2203/04 ,  B81C1/00103 ,  B81C1/00246 ,  B81C2203/0735 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/357