公开(公告)号：EP2394274A4

公开(公告)日：2017-11-08

申请号：EP10739104

申请日：2010-02-04

申请人： NORTHROP GRUMMAN SYSTEMS CORP

发明人： BLUZER NATHAN ,  KRISHNASWAMY SILAI V ,  SMITH PHILIP C

IPC分类号： H01B13/00

CPC分类号： H01L31/08 ,  B81B3/0081 ,  B81B2201/0207 ,  H01L23/3121 ,  H01L31/18 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP2436049A4

公开(公告)日：2014-07-02

申请号：EP10781289

申请日：2010-05-28

申请人： NORTHROP GRUMMAN SYSTEMS CORP

发明人： ADAM JOHN D ,  KRISHNASWAMY SILAI V ,  PIAZZA GIANLUCA

IPC分类号： H03H9/17 ,  H03H3/02 ,  H03H9/02 ,  H03H9/15 ,  H03H9/24

CPC分类号： H03H9/02078 ,  H03H9/02228 ,  H03H9/172 ,  H03H2003/023 ,  H03H2009/02488 ,  H03H2009/155 ,  H03H2009/241 ,  Y10T29/42

摘要： A bulk acoustic resonator assembly and methods for fabricated the resonator assembly is provided. The resonator includes a cavity on a first surface of a substrate, with a sheet of low acoustic loss material suspended over the cavity. The sheet of low acoustic loss material is configured such that an associated fundamental frequency of the sheet of low acoustic loss material is a function of a length of the sheet of low acoustic loss material in a direction parallel to the first surface of the substrate. A transducer includes an electromechanical layer on the sheet of low acoustic loss material and a patterned conductive material formed on the electromechanical material. The transducer is configured to induce vibrations in the low acoustic loss material upon application of an electrical signal to the conductive pattern.