公开(公告)号：EP3029415A1

公开(公告)日：2016-06-08

申请号：EP15173406.8

申请日：2015-06-23

申请人： Namiki Seimitsu Houseki Kabushiki Kaisha

发明人： YAMAZAKI, Hiroshi ,  FUKUSHIMA, Eri ,  YANAGIURA, Kazumi ,  ASADA, Takafumi

IPC分类号： G01B11/12 ,  G01B9/02 ,  G01B11/24 ,  A61B5/00 ,  A61B1/00

摘要： Higher-precision measurement is achieved by an optical inner surface measuring device configured to cause a probe to enter into the inner peripheral surface or deep hole of a target object, capture and observe reflection light from the inner surface in a three-dimensional manner, and measure the accuracy of the target object. In a structure including an optical fiber built into a tube, a light path conversion unit arranged at a leading end side of the optical fiber, and a motor configured to rotationally drive the light path conversion unit, a unit for measuring the amount of runout of a rotation shaft unit of the motor is provided. Shape data on the inner peripheral surface of a target object is obtained by calculating at a computer reflection light from the target object, and is modified by displacement amount data from a displacement measurement unit to realize high-precision measurement with no measurement error resulting from runout and rotational vibration of the rotation shaft of the motor.

摘要翻译： 通过配置成使探针进入目标物体的内周面或深孔的光学内表面测量装置，以三维方式捕获并观察来自内表面的反射光，实现更高精度的测量，以及 测量目标对象的准确性。 在包括内置于管中的光纤的结构中，布置在光纤的前端侧的光路转换单元和被配置为旋转驱动光路转换单元的电动机，用于测量光路径的跳动量的单元 提供电动机的旋转轴单元。 通过计算来自目标物体的计算机反射光来获得目标物体的内周面上的形状数据，并且通过位移测量单元的位移量数据进行修改，以实现高精度测量，而不产生由跳动引起的测量误差 以及电动机的旋转轴的旋转振动。