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    FILTER COMPRISING STACKABLE FILTER WAFERS WITH FILTERING CHANNELS ON OPPOSING SIDES OF THE WAFERS
    3.
    发明公开
    FILTER COMPRISING STACKABLE FILTER WAFERS WITH FILTERING CHANNELS ON OPPOSING SIDES OF THE WAFERS 审中-公开
    过滤器，包括可堆叠的过滤器滤波器和过滤器反面的过滤器通道

    公开(公告)号：EP2558182A1

    公开(公告)日：2013-02-20

    申请号：EP11769164.2

    申请日：2011-04-04

    申请人： NanoSpace AB

    发明人： JONSSON, Kerstin ,  BENDIXEN, Maria ,  JOHANSSON, Håkan ,  GRÖNLAND, Tor-Arne

    IPC分类号： B01D29/46 ,  B01D29/44 ,  B01D29/56 ,  B01D29/58

    CPC分类号： B01D29/46

    摘要： A filter comprises a stack of wafers (28). Each of the wafers has a through hole (6). Edges (7) of the holes together define an internal tube. An interface (32) between adjacent wafers defines filter channels. The filter channels comprises first coarse filter channels (20), second coarse filter channels (22) and fine filter channels (26). The first coarse filter channels are open towards an outer rim (5), extend in a direction from the outer rim and are closed towards the internal tube. The second coarse filter channels are arranged in an opposite manner. The fine filter channels connect the first and second coarse filter channels. The first and second coarse filter channels extend radially (R) and the fine filter channels extend tangentially (T). The first and second coarse filter channels are defined by recesses in a surface of a first wafer and the fine filter channels are defined by recesses, each one encircling the hole, in a surface of a second wafer.

    摘要翻译： 过滤器包括一叠晶片（28）。 每个晶片都有一个通孔（6）。 孔的边缘（7）一起限定内管。 相邻晶片之间的接口（32）限定过滤器通道。 过滤通道包括第一粗过滤通道（20），第二粗过滤通道（22）和精过滤通道（26）。 第一粗过滤器通道朝向外缘（5）敞开，沿着从外缘延伸的方向延伸并朝向内管闭合。 第二粗滤器通道以相反的方式排列。 细过滤器通道连接第一和第二粗过滤器通道。 第一和第二粗过滤器通道径向延伸（R），细过滤器通道沿切向（T）延伸。 第一和第二粗过滤器通道由第一晶片的表面中的凹陷限定，并且精细过滤器通道由第二晶片的表面中的凹陷限定，每个凹陷围绕孔。