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公开(公告)号:EP3977105A2
公开(公告)日:2022-04-06
申请号:EP20839621.8
申请日:2020-05-29
发明人: EIAMCHAI, Pitak , NUNTAWONG, Noppadon , HORPRATHUM, Mati , LIMWICHEAN, Saksorn , LIMSUWAN, Nutthamon , PATTHANASETTAKUL, Viyapol , CHANANONNAWATHORN, Chanunthorn , KALASUNG, Sukon , SOMBOONSAKSRI, Pacharamon
IPC分类号: G01N21/65 , G01N21/62 , G01N33/553 , H01L27/01