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公开(公告)号：EP4375642A1
公开(公告)日：2024-05-29
申请号：EP22209834.5
申请日：2022-11-28
CPC分类号： G01N2021/172920130101 , G01N21/1717 , G01N2201/063920130101 , G01N2021/172520130101 , G01N21/4795
摘要： A method and system for imaging subsurface features (Sf) below a surface (Ss) of a substrate (S). Acoustic waves (W) are generated and scattered from the subsurface features (Sf) inside the substrate (S). A beam of probe light (Lpr) interacts with a probe region (Spr) of the substrate (S) traversed by the acoustic waves (W) scattering from the subsurface features (Sf). The subsurface features (Sf) are imaged based on a modulation of the probe light (Lpr) caused by the interaction with the acoustic waves (W) in the probe region (Spr). The probe light (Lpr) is focused onto the substrate (S) via a microlens (11) generating a photonic jet (Lj) with a focal region coinciding with the probe region (Spr). This may photonic jet (Lj) may provide a relatively small focus thereby improving lateral resolution for measuring the subsurface features (Sf) via acoustic waves (W).
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公开(公告)号：EP4281764A1
公开(公告)日：2023-11-29
申请号：EP22701068.3
申请日：2022-01-19
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3.发明公开
公开(公告)号：EP4154439A1
公开(公告)日：2023-03-29
申请号：EP21727272.3
申请日：2021-05-17
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公开(公告)号：EP4091337A1
公开(公告)日：2022-11-23
申请号：EP21701029.7
申请日：2021-01-18
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公开(公告)号：EP3973300A1
公开(公告)日：2022-03-30
申请号：EP20730125.0
申请日：2020-05-22
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公开(公告)号：EP3938090A1
公开(公告)日：2022-01-19
申请号：EP20713997.3
申请日：2020-03-12
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公开(公告)号：EP3851886A8
公开(公告)日：2021-09-01
申请号：EP20152269.5
申请日：2020-01-16
发明人： HARMSMA, Peter Johan , VAN NEER, Paul Louis Maria Joseph , ALTMAN, Robert Karl , PIRAS, Daniele , VAN DER HEIDEN, Maurits Sebastiaan
摘要： The photonic integrated device for converting a light signal into sound comprises-a substrate having a substrate surface, an optical waveguide on the substrate surface, a photo-acoustic conversion body, comprising at least one volume of fractionally light absorbing material or formed entirely of fractionally light absorbing material, wherein a width of the photo-acoustic conversion body is greater than a width of the optical waveguide and means for enhancing distribution of light from the optical waveguide over the photo-acoustic conversion body.
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公开(公告)号：EP3742178A8
公开(公告)日：2021-02-24
申请号：EP19175565.1
申请日：2019-05-21
发明人： RAJADURAI, Sri Ram Shankar , PIRAS, Daniele , HATAKEYAMA, Kodai , VAN NEER, Paul Louis Maria Joseph , VAN ES, Maarten Hubertus , SADEGHIAN MARNANI, Hamed , VAN DER LANS, Marcus Johannes
摘要： The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.
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公开(公告)号：EP3742178A1
公开(公告)日：2020-11-25
申请号：EP19175565.1
申请日：2019-05-21
发明人： RAJADURAI, Sri Ram Shankar , PIRAS, Daniele , HATAKEYAMA, Kodai , VAN NEER, Paul Louis Maria Joseph , VAN ES, Maarten Hubertus , SEDAGHIAN MARNANI, Hamed , VAN DER LANS, Marcus Johannes
摘要： The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.
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公开(公告)号：EP3676573A1
公开(公告)日：2020-07-08
申请号：EP18766386.9
申请日：2018-08-28
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