公开(公告)号：EP1252493A1

公开(公告)日：2002-10-30

申请号：EP01908732.9

申请日：2001-01-29

申请人： New Focus, Inc.

发明人： WIPPICH, Mark ,  SMOLKA, Grogory, L. ,  HAND, Carter, F. ,  SHINE, Robert, John, Jr.

IPC分类号： G01M11/00

CPC分类号： G01M11/33 ,  G01M11/00

摘要： A system and method for real time process control, using a linearly swept tunable laser, which allows high speed in-situ monitoring and control of wavelength-specific properties of optical components. The invention comprises scanning an optical component with a high speed, high linearity tunable laser, and detecting optical output from the component during the scanning. Preferably, the invention also includes adjusting or controlling the optical properties of the component during scanning, according to detected optical output from the component. The invention is embodied in a process control system comprising a high speed, high linearity, tunable laser operatively coupled to an optical component which in turn is operatively coupled to an optical detector. A system control processor is operatively coupled to the tunable laser and detector. A processing control unit is associated with the optical component and is operatively coupled to the system control processor. In operation, the optical component is scanned by the tunable laser, and real time process control of one or more wavelength specific properties of the optical component may be carried out according to feedback from the optical detector and process control unit.