REACTION FORCE ISOLATION SYSTEM FOR A PLANAR MOTOR
    4.
    发明公开
    REACTION FORCE ISOLATION SYSTEM FOR A PLANAR MOTOR 审中-公开
    反作用力隔离SYSTEM FOR A平面电动机

    公开(公告)号:EP1105780A1

    公开(公告)日:2001-06-13

    申请号:EP99943701.5

    申请日:1999-08-12

    申请人: Nikon Corporation

    IPC分类号: G05B5/01 G05B11/01 B64C17/06

    摘要: The present invention provides a structure for isolating the reaction forces generated by a planar motor. Specifically, the fixed portion of the reaction motor, which is subject to reaction forces, is structurally isolated from the rest of the system in which the planar motor is deployed. In accordance with one embodiment of the present invention, the fixed portion of the planar motor is separated from the rest of the system and coupled to ground. The rest of the system is isolated from ground by deploying vibration isolation means. Alternatively or in addition, the fixed portion of the planar motor may be structured to move (e.g., on bearings) in the presence of reaction forces, so as to absorb the reaction forces with its inertia. In a further embodiment of the present invention, the fixed portion of the planar motor and the article to be moved are supported by the same frame, with the fixed portion of the planar motor movable on bearings.

    METHOD OF MANUFACTURING LINEAR MOTOR, LINEAR MOTOR, STAGE PROVIDED WITH THE LINEAR MOTOR, AND EXPOSURE SYSTEM
    5.
    发明公开
    METHOD OF MANUFACTURING LINEAR MOTOR, LINEAR MOTOR, STAGE PROVIDED WITH THE LINEAR MOTOR, AND EXPOSURE SYSTEM 审中-公开
    用于生产直线电机,直线电机运载系统这样的线性马达和曝光系统

    公开(公告)号:EP1063756A1

    公开(公告)日:2000-12-27

    申请号:EP99939233.5

    申请日:1999-03-09

    申请人: Nikon Corporation

    IPC分类号: H02K41/02

    摘要: A coil frame 24 of an armature coil unit 23 constituting a linear motor R1 comprises a pair of holding portions 26 and 26 and a connection portion 27 that connects these holding portions 26 and 26 to each other, and grooves 28 that holds ends 25a of the respective flat coils 25 are formed at an interval corresponding to an array interval of permanent magnets.

    摘要翻译: 构成线性电动机的电枢线圈单元23的线圈框架24 R 1包括一对保持部分26和26以及连接部分27没有连接论文保持部26和26彼此,和槽28没有保存结束的25A respectivement平面线圈25是在FORMED间隔在永磁铁的排列间隔对应于。