Grinding spindle with dual tool mounting means
    1.
    发明公开
    Grinding spindle with dual tool mounting means 审中-公开
    Schleifspindel mit doppelter Werkzeughaltevorrichtung

    公开(公告)号:EP1112812A3

    公开(公告)日:2003-10-15

    申请号:EP00128457.9

    申请日:2000-12-22

    摘要: A finishing grindstone member 20 is fixed to a spindle 10 by a bolt. In the spindle 10, there is formed a tool mounting portion 25 into which a rough grindstone member can be mounted. Into the tool mounting portion 25, there can be mounted not only the rough grindstone member but also a cover member 36. After a silicone wafer is roughly ground using the rough grindstone member, when finish grinding the silicone wafer using the finishing grindstone member 20, the cover member 36 is mounted onto the tool mounting portion 25 to thereby prevent the tool mounting portion 25 from being soiled.

    摘要翻译: 精加工磨石构件20通过螺栓固定在心轴10上。 在主轴10中,形成有可以安装粗磨石构件的工具安装部25。 在工具安装部25中,不仅可以安装粗磨石构件,而且还可以安装盖构件36.在使用粗磨石构件粗略研磨硅晶片之后,当使用精加工磨石构件20对硅树脂硅片进行精磨时, 盖构件36安装在工具安装部25上,从而防止工具安装部25弄脏。

    Grinder and grinding method
    2.
    发明公开
    Grinder and grinding method 失效
    Schleifmaschine und Verfahren

    公开(公告)号:EP0868968A3

    公开(公告)日:2000-07-19

    申请号:EP98105554.4

    申请日:1998-03-26

    CPC分类号: B24B7/228 B24B41/04 B24B49/16

    摘要: A spindle 23 of a grinding wheel 28 is rotatively borne by a bench 22 for the grinding wheel through hydrostatic thrust bearings 26 and 27. A pressure regulator 38 for regulating the pressure which must be supplied to at least either of supply ports 26a and 27a opposite to each other in the direction of the axial line of the spindle 23 in the hydrostatic thrust bearings 26 and 27 is provided. The pressure regulator 38 has a changing member for changing a passage for choking the fluid and the length of the choking passage.

    摘要翻译: 砂轮28的主轴23通过静压止推轴承26和27的用于砂轮的台架22旋转地承载。压力调节器38用于调节必须供应至至少任一个供给口26a和27a的压力 在静压推力轴承26和27中设置在主轴23的轴线方向上的彼此。 压力调节器38具有用于改变用于阻塞流体的通道和阻塞通道的长度的改变构件。