公开(公告)号：EP1801846A1

公开(公告)日：2007-06-27

申请号：EP05028296.1

申请日：2005-12-23

申请人： OC Oerlikon Balzers AG

发明人： Rohrmann, Hartmut ,  Schlegel, Peter ,  Neusch, Marcel ,  Rattunde, Oliver

IPC分类号： H01J37/36 ,  H01J37/34 ,  C23C14/34 ,  C23C14/35 ,  C23C14/32

CPC分类号： C23C14/3407 ,  H01J37/34 ,  H01J37/3423 ,  H01J37/3435

摘要： So as to provide a target arrangement with improved mounting and dismounting ability, the target arrangement comprises a plate along a plane (E) which has a border (7) defined by a first wedge surface (5 u ) angled to the addressed general plane (E) and a second wedge surface (5 1 ) which is substantially planar as well and angled with respect to the generic plane (E). The two wedge surfaces mutually convert in a direction along the addressed plane (E) and from a more central area of the plate outwardly.

公开(公告)号：EP1801846B1

公开(公告)日：2009-07-08

申请号：EP05028296.1

申请日：2005-12-23

申请人： OC Oerlikon Balzers AG

发明人： Rohrmann, Hartmut ,  Schlegel, Peter ,  Neusch, Marcel ,  Rattunde, Oliver

IPC分类号： H01J37/36 ,  H01J37/34 ,  C23C14/34 ,  C23C14/35 ,  C23C14/32

CPC分类号： C23C14/3407 ,  H01J37/34 ,  H01J37/3423 ,  H01J37/3435