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    COVERING MATERIAL STRIPPING METHOD AND STRIPPING DEVICE USING ION IRRADIATION
    2.
    发明公开
    COVERING MATERIAL STRIPPING METHOD AND STRIPPING DEVICE USING ION IRRADIATION 有权
    ABDECKMATERIALABLÖSUNGSVERFAHRENUNDABLÖSUNGSVORRICHTUNGMIT IONENBESTRAHLUNG

    公开(公告)号：EP3168857A4

    公开(公告)日：2017-07-12

    申请号：EP16776446

    申请日：2016-03-29

    申请人： SHINMAYWA IND LTD

    发明人： UEMURA KENSUKE ,  REMNEV G ALEXEY

    IPC分类号： H01J37/30 ,  C23C14/02 ,  H01J37/32 ,  H01J37/36

    CPC分类号： H01J37/3053 ,  C23C14/022 ,  C23C16/0245 ,  H01J37/08 ,  H01J37/30 ,  H01J2237/006 ,  H01J2237/0825 ,  H01J2237/20214 ,  H01J2237/3114 ,  H01J2237/3132 ,  H01J2237/3151

    摘要： A de-coating method capable of recycling a tool or a mechanical part coated with an inorganic material such as PCD (poly-crystalline diamond) is provided. According to the de-coating method, a substrate to be subjected to de-coating (coated body) is less likely to have a dead area during ion irradiation, a brittle phase is less likely to be formed in the substrate (metal body) in terms of temperature, and de-coating can be performed at an economical speed. The problems can be solved by the de-coating method including: exposing the coated body in which a coating made of an inorganic material is formed on a surface of the metal body to ion flows to peel off the coating from the metal body, wherein the coated body is placed at an ion flow-concentrated portion where two or more ion flows overlap each other, and is exposed to the ion flows without addition of a positive or negative bias to the coated body. As gases for use in generating ions from plasma, oxygen and CF 4 that promote de-coating through a chemical reaction are preferably used in addition to Ar that performs de-coating under the physical action of ion collision and stabilizes plasma.

    摘要翻译： 提供了能够再循环涂覆有无机材料如PCD（多晶金刚石）的工具或机械部件的去涂层方法。 根据脱涂法，待离子化的基板（被覆体）在离子照射时难以产生死区，在基板（金属体）内不易形成脆性相 温度条件和脱涂层可以以经济的速度进行。 这些问题可以通过脱涂方法来解决，该脱涂方法包括：将在其中形成有由无机材料制成的涂层的涂覆体暴露在金属体的表面上以离子流动，以从金属体上剥离涂层，其中 将涂布体置于两个或更多个离子流彼此重叠的离子流集中部分处，并且暴露于离子流而不向涂布体施加正偏压或负偏压。 作为用于从等离子体产生离子的气体，除了在离子碰撞的物理作用下进行去涂层并使等离子体稳定的Ar之外，优选使用促进通过化学反应进行去涂层的氧和CF 4。

    CATHODIC ARC EVAPORATION DEVICE AND METHOD OF IGNITING SAID ARC
    5.
    发明公开
    CATHODIC ARC EVAPORATION DEVICE AND METHOD OF IGNITING SAID ARC 审中-公开
    VODFAHREN ZUM ZENNDEN DES BOGENS KATHODISCHE BOGENVERDAMPFUNGSEINRICHTUNG

    公开(公告)号：EP1939925A1

    公开(公告)日：2008-07-02

    申请号：EP05786856.4

    申请日：2005-08-02

    申请人： FUNDACION TEKNIKER

    发明人： GOIKOETXEA LARRINAGA, Josu

    IPC分类号： H01J37/36 ,  C23C14/32

    CPC分类号： H01J37/32614 ,  C23C14/325 ,  H01J37/32055 ,  H01J37/3266

    摘要： The invention relates to a cathodic arc evaporation device comprising an evaporation chamber (2), at least one cathode (7) and at least one anode (13, 13A). The cathode (7) comprises a body of a material which is evaporated by the arc on an evaporation surface (71). According to the invention, an insert (100, 200) is disposed on the aforementioned evaporation surface (71), said insert comprising an electrically conductive part (101, 201) which projects out in relation to the evaporation surface (71), in order to establish a point for the easy formation of a spark. The inventive device also comprises a gas inlet (102, 202) which is aligned with the above-mentioned electrically-conductive part (101, 201) and which is used to inject a gas into the chamber (2) at said electrically conductive part, in order to facilitate the formation of a spark. The invention also relates to an arc ignition method.

    摘要翻译： 本发明涉及包括蒸发室（2），至少一个阴极（7）和至少一个阳极（13,13A）的阴极电弧蒸发装置。 阴极（7）包括在蒸发表面（71）上被电弧蒸发的材料体。 根据本发明，插入件（100,200）设置在上述蒸发表面（71）上，所述插入件包括相对于蒸发表面（71）突出的导电部分（101,201），按顺序 建立一个容易形成火花的点。 本发明的装置还包括与上述导电部件（101,201）对准的气体入口（102,202），其用于在所述导电部件处将气体注入到室（2）中， 以便于形成火花。 本发明还涉及一种电弧点火方法。

    COVERING MATERIAL STRIPPING METHOD USING ION IRRADIATION
    7.
    发明授权
    COVERING MATERIAL STRIPPING METHOD USING ION IRRADIATION 有权

    公开(公告)号：EP3168857B1

    公开(公告)日：2018-08-22

    申请号：EP16776446.3

    申请日：2016-03-29

    申请人： ShinMaywa Industries, Ltd.

    发明人： UEMURA, Kensuke ,  REMNEV G. Alexey

    IPC分类号： C23C14/02 ,  C23C16/02 ,  H01J37/305 ,  H01J37/36 ,  H01J37/32

    CPC分类号： H01J37/3053 ,  C23C14/022 ,  C23C16/0245 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/0825 ,  H01J2237/20214 ,  H01J2237/3114 ,  H01J2237/3132 ,  H01J2237/3151

    摘要： A de-coating method capable of recycling a tool or a mechanical part coated with an inorganic material such as PCD (poly-crystalline diamond) is provided. According to the de-coating method, a substrate to be subjected to de-coating (coated body) is less likely to have a dead area during ion irradiation, a brittle phase is less likely to be formed in the substrate (metal body) in terms of temperature, and de-coating can be performed at an economical speed. The problems can be solved by the de-coating method including: exposing the coated body in which a coating made of an inorganic material is formed on a surface of the metal body to ion flows to peel off the coating from the metal body, wherein the coated body is placed at an ion flow-concentrated portion where two or more ion flows overlap each other, and is exposed to the ion flows without addition of a positive or negative bias to the coated body. As gases for use in generating ions from plasma, oxygen and CF 4 that promote de-coating through a chemical reaction are preferably used in addition to Ar that performs de-coating under the physical action of ion collision and stabilizes plasma.