公开(公告)号：EP0379594B1

公开(公告)日：1994-12-07

申请号：EP89908265.5

申请日：1989-07-07

申请人： OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  NAKAHARA,Fumio ,  SATOH,Tuyosi ,  UMEDA, Masaru

IPC分类号： C23C16/44 ,  C23C16/52 ,  C23C14/22 ,  C23F4/00 ,  H01L21/205 ,  H01L21/302 ,  H01L21/31

CPC分类号： B08B9/0325 ,  C23C14/564 ,  C23C16/4402 ,  C23C16/4404

摘要： A gas supply pipeline system for process equipment, adapted to supply at least two kinds of process gas, and provided with at least two valves (135, 136, 139, 140) installed in each of independent flow passages formed between process gas supply pipelines and a purge gas supply pipe line, and at least two valves (137, 138, 141, 142) installed in each of a plurality of flow passages formed between the process gas supply pipelines and the pipelines in the process equipment. Each of the process gas supply pipelines and each of the pipelines in the process equipment can be purged and vacuumed by at least two valves in each of these flow passages that are opened or closed independently, and the stagnation of a gas in the pipelines not in use can be prevented by introducing a purge gas constantly thereinto.

公开(公告)号：EP0379594A1

公开(公告)日：1990-08-01

申请号：EP89908265.5

申请日：1989-07-07

申请人： Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  NAKAHARA,Fumio ,  SATOH,Tuyosi ,  UMEDA, Masaru

IPC分类号： C23C16/44 ,  C23C16/52 ,  C23C14/22 ,  C23F4/00 ,  H01L21/205 ,  H01L21/302 ,  H01L21/31

CPC分类号： B08B9/0325 ,  C23C14/564 ,  C23C16/4402 ,  C23C16/4404

摘要： A gas supply pipeline system for process equipment, adapted to supply at least two kinds of process gas, and provided with at least two valves (135, 136, 139, 140) installed in each of independent flow passages formed between process gas supply pipelines and a purge gas supply pipe line, and at least two valves (137, 138, 141, 142) installed in each of a plurality of flow passages formed between the process gas supply pipelines and the pipelines in the process equipment. Each of the process gas supply pipelines and each of the pipelines in the process equipment can be purged and vacuumed by at least two valves in each of these flow passages that are opened or closed independently, and the stagnation of a gas in the pipelines not in use can be prevented by introducing a purge gas constantly thereinto.

摘要翻译： 供气管道系统用于加工过程。 用于提供至少两种处理气体，并且在过程和气体供应管线之间形成的独立流动通道中安装两个阀，以及安装在过程气体供应管线和管道中形成的每个流动通道中的阀门 。