公开(公告)号：EP1039595A3

公开(公告)日：2003-09-10

申请号：EP00302417.1

申请日：2000-03-24

申请人： Ohmi, Tadahiro ,  CANON KABUSHIKI KAISHA

发明人： Ohmi, Tadahiro ,  Suzuki, Nombasa ,  Ohsawa, Hiroshi ,  Tanaka, Nobuyoshi ,  Shinohara, Toshikuni ,  Hirayama, Masaki

IPC分类号： H01S3/0975 ,  H01S3/225

CPC分类号： H01S3/225 ,  H01S3/0975

摘要： An excimer laser gas in a laser tube 2 is excited by a microwave introduced from awaveguide 1, and electric field concentration occurs in a slit-shaped gap 3 provided in a plate member 11c, causing plasma discharge. Then the phase of plasma light is regulated and the light is resonated, to cause excimer laser light. This construction realizes plasma excitation entirely uniform along a lengthwise direction of laser light emission, and enables uniform laser light emission with minimum energy loss.

公开(公告)号：EP1039595A2

公开(公告)日：2000-09-27

申请号：EP00302417.1

申请日：2000-03-24

申请人： Ohmi, Tadahiro ,  CANON KABUSHIKI KAISHA

发明人： Ohmi, Tadahiro ,  Suzuki, Nombasa ,  Ohsawa, Hiroshi ,  Tanaka, Nobuyoshi ,  Shinohara, Toshikuni ,  Hirayama, Masaki

IPC分类号： H01S3/0975 ,  H01S3/225

CPC分类号： H01S3/225 ,  H01S3/0975

摘要： An excimer laser gas in a laser tube 2 is excited by a microwave introduced from awaveguide 1, and electric field concentration occurs in a slit-shaped gap 3 provided in a plate member 11c, causing plasma discharge. Then the phase of plasma light is regulated and the light is resonated, to cause excimer laser light. This construction realizes plasma excitation entirely uniform along a lengthwise direction of laser light emission, and enables uniform laser light emission with minimum energy loss.

摘要翻译： 激光管2中的受激准分子激光气体被从波导1引入的微波激励，电场集中发生在设置在板状部件11c上的狭缝状的间隙3中，产生等离子体放电。 然后等离子体光的相位被调节并且光被共振，以引起准分子激光。 这种结构实现了沿着激光发射的长度方向的等离子体激发完全均匀，并且以最小的能量损失实现均匀的激光发射。