公开(公告)号：EP1894900A2

公开(公告)日：2008-03-05

申请号：EP07016757.2

申请日：2007-08-27

申请人： Osaka University ,  EBARA CORPORATION

发明人： Yamauchi, Kazuto ,  Sano, Yasuhisa ,  Hara, Hideyuki ,  Murata, Junji ,  Yagi, Keita

IPC分类号： C03C15/00 ,  C04B41/00 ,  C23F1/00 ,  C30B33/00 ,  H01L21/04 ,  H01L21/306 ,  H01L21/321

CPC分类号： H01L21/3212 ,  B01J23/28 ,  C23C8/40 ,  C23C18/14 ,  C25D5/06 ,  C25D5/22 ,  C25D21/12 ,  H01L21/02348 ,  H01L21/30612 ,  H01L21/31051 ,  H01L21/32115 ,  H01L21/32134

摘要： A catalyst-aided chemical processing method can process hard-to-process materials, especially SiC, GaN, etc. whose importance as electronic device materials is increasing these days, with high processing efficiency and high precision even for a space wavelength range of not less than several tens of µm. The catalyst-aided chemical processing method comprises: putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved; and moving the workpiece and a catalyst composed of molybdenum or a molybdenum compound relative to each other while keeping the catalyst in contact with or close proximity to a surface to be processed of the workpiece, thereby processing the surface of the workpiece.

摘要翻译： 催化辅助化学处理方法可以处理难加工材料，特别是SiC，GaN等，其电子器件材料的重要性日益增加，即使对于不小于等于的空间波长范围，处理效率高，精度高 比几十μm。 催化剂辅助化学处理方法包括：将工件放入其中溶解含卤素分子的处理液中; 并且使工件和由钼或钼化合物组成的催化剂相对于彼此移动，同时保持催化剂与待加工的表面接触或接近工件，从而处理工件的表面。

公开(公告)号：EP1894900A3

公开(公告)日：2010-02-24

申请号：EP07016757.2

申请日：2007-08-27

申请人： Osaka University ,  EBARA CORPORATION

发明人： Yamauchi, Kazuto ,  Sano, Yasuhisa ,  Hara, Hideyuki ,  Murata, Junji ,  Yagi, Keita

IPC分类号： C03C15/00 ,  C04B41/00 ,  C23F1/00 ,  C30B33/00 ,  H01L21/04 ,  H01L21/306 ,  H01L21/321 ,  H01L21/3213

CPC分类号： H01L21/3212 ,  B01J23/28 ,  C23C8/40 ,  C23C18/14 ,  C25D5/06 ,  C25D5/22 ,  C25D21/12 ,  H01L21/02348 ,  H01L21/30612 ,  H01L21/31051 ,  H01L21/32115 ,  H01L21/32134

摘要： A catalyst-aided chemical processing method can process hard-to-process materials, especially SiC, GaN, etc. whose importance as electronic device materials is increasing these days, with high processing efficiency and high precision even for a space wavelength range of not less than several tens of µm. The catalyst-aided chemical processing method comprises: putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved; and moving the workpiece and a catalyst composed of molybdenum or a molybdenum compound relative to each other while keeping the catalyst in contact with or close proximity to a surface to be processed of the workpiece, thereby processing the surface of the workpiece.

公开(公告)号：EP2381008A2

公开(公告)日：2011-10-26

申请号：EP11006032.4

申请日：2007-08-27

申请人： Osaka University ,  EBARA CORPORATION

发明人： Yamauchi, Kazuto ,  Sano, Yasuhisa ,  Hara, Hideyuki ,  Murata, Junji ,  Yagi, Keita

IPC分类号： C23C8/40 ,  C23C18/14 ,  C25D5/06 ,  C25D5/22 ,  C25D21/12 ,  H01L21/306 ,  H01L21/321 ,  H01L21/3213

CPC分类号： H01L21/3212 ,  B01J23/28 ,  C23C8/40 ,  C23C18/14 ,  C25D5/06 ,  C25D5/22 ,  C25D21/12 ,  H01L21/02348 ,  H01L21/30612 ,  H01L21/31051 ,  H01L21/32115 ,  H01L21/32134

摘要： A catalyst-aided chemical processing method can process hard-to-process materials, especially SiC, GaN, etc. whose importance as electronic device materials is increasing these days, with high processing efficiency and high precision even for a space wavelength range of not less than several tens of [mu]m. The catalyst-aided chemical processing method comprises: putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved; and moving the workpiece and a catalyst composed of molybdenum or a molybdenum compound relative to each other while keeping the catalyst in contact with or close proximity to a surface to be processed of the workpiece, thereby processing the surface of the workpiece.

摘要翻译： 催化辅助化学处理方法可以处理难加工材料，特别是SiC，GaN等，其电子器件材料的重要性日益增加，即使对于不小于等于的空间波长范围，处理效率高，精度高 比几十微米。 催化剂辅助化学处理方法包括：将工件放入其中溶解含卤素分子的处理液中; 并且使工件和由钼或钼化合物组成的催化剂相对于彼此移动，同时保持催化剂与待加工的表面接触或接近工件，从而处理工件的表面。