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公开(公告)号:EP1502311A2
公开(公告)日:2005-02-02
申请号:EP03727418.0
申请日:2003-04-30
发明人: Chong, Shi Chai , GUENTHER, Ewald, Karl, Michael , LACEY, David , Lim, Hooi Bin , KLAUSMANN, Hagen , Tan, Cheng Kooi
IPC分类号: H01L51/20
CPC分类号: H01L51/5206 , H01L27/3283 , H01L27/3288 , H01L51/524 , H01L51/5246
摘要: A method to ensure uniform deposition of organic layer is disclosed. Since the organic layer is very thin, any deviation from the target thickness will result in visible optical defects. A homogenous layer (275) which exhibits good coating behaviour with organic materials is provided beneath the organic layer. By covering the metal interconnects (205), the adverse effect on the uniformity of the polymer layer is reduced or prevented.
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公开(公告)号:EP1502311B1
公开(公告)日:2014-12-03
申请号:EP03727418.0
申请日:2003-04-30
发明人: Chong, Shi Chai , GUENTHER, Ewald, Karl, Michael , LACEY, David , Lim, Hooi Bin , KLAUSMANN, Hagen , Tan, Cheng Kooi
IPC分类号: H01L51/52
CPC分类号: H01L51/5206 , H01L27/3283 , H01L27/3288 , H01L51/524 , H01L51/5246
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