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    INERTIA FORCE SENSOR
    1.
    发明公开
    INERTIA FORCE SENSOR 有权
    惯性力传感器

    公开(公告)号：EP2000769A4

    公开(公告)日：2010-03-10

    申请号：EP07739591

    申请日：2007-03-26

    申请人： PANASONIC CORP

    发明人： AIZAWA HIROYUKI ,  OHUCHI SATOSHI

    IPC分类号： G01C19/56 ,  G01C19/5607 ,  G01P15/09 ,  G01P15/18 ,  H01L41/08 ,  H01L41/18

    CPC分类号： G01P15/09 ,  G01C19/5719 ,  G01P15/18 ,  H01L41/08

    摘要： Inertial force sensor (50) includes detecting element (1) that detects inertial force. Detecting element (1) includes: two first orthogonal arms (52) each having first arm (2) and second arm (4) that are connected to each other in a substantially orthogonal direction; support portion (6) that supports two first arms (2); fixing arms (8); and weights (14). Second arms (4) include: bent portions (4a); facing portions (16) that are bent at bent portions (4a) so as to face second arms (4); driving electrodes (18) that are formed in two facing portions (16) facing each other, and drive and vibrate facing portions (16); and detection electrodes (20) that are formed in the other two facing portions (16) facing each other, and detect the distortion of facing portions (16). According to this structure, it is possible to achieve small inertial force sensor (50) capable of detecting a plurality of different inertial forces and inertial forces acting on a plurality of detection axes.

    SENSOR
    7.
    发明公开
    SENSOR 有权

    公开(公告)号：EP2053413A4

    公开(公告)日：2011-11-16

    申请号：EP07831491

    申请日：2007-11-09

    申请人： PANASONIC CORP

    发明人： OHUCHI SATOSHI ,  NOZOE TOSHIYUKI ,  AIZAWA HIROYUKI

    IPC分类号： G01P15/125 ,  G01C19/56 ,  G01C19/5719 ,  G01P15/18

    CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01P1/023 ,  G01P5/14 ,  G01P15/18

    摘要： A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight(18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight(18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.