公开(公告)号：EP3396014A1

公开(公告)日：2018-10-31

申请号：EP16879251.3

申请日：2016-12-14

申请人： POSCO

发明人： NAM, Kyung Hoon ,  KIM, Sang Joon ,  KO, Kyoung Pil ,  KIM, Tae Yeob ,  EOM, Mun Jong

IPC分类号： C23C14/24 ,  C23C14/54 ,  C23C14/02

CPC分类号： C23C14/243 ,  B01D45/16

摘要： The present invention relates to a vacuum deposition device for high-speed coating, comprising: a vacuum chamber having a reception space arranged therein; an evaporation crucible disposed in the reception space to evaporate a coating material; and a cyclone filter disposed in the reception space, wherein the cyclone filter separates a coarse particle from steam generated during the evaporation of the coating material. Therefore, the vacuum deposition device for high-speed coating can remove a coarse particle generated in the high-speed coating, prevent the rotation of steam, using a baffle inserted between a steam ejection opening and an exit of the cyclone filter, and thus obtain a coating layer having the excellent uniformity of coating.