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公开(公告)号:EP1436841A1
公开(公告)日:2004-07-14
申请号:EP02759070.2
申请日:2002-05-20
发明人: LIEBER, Charles, M. , DUAN, Xiangfeng , CUI, Yi , HUANG, Yu , GUDIKSEN, Mark S. , LAUHON, Lincoln J. , WANG, Jiangfang , PARK, Hongkun , WEI, Quingqiau , LIANG, Wenjie , SMITH, David C.,Uni. of Southampton , WANG, Deli , ZHONG, Zhaohui
IPC分类号: H01L29/06
CPC分类号: H01L29/0665 , B82Y10/00 , B82Y15/00 , C30B11/00 , C30B25/005 , C30B29/605 , G01N27/4146 , G01N33/54373 , G11C13/0014 , G11C13/0019 , G11C13/025 , G11C13/04 , G11C2213/77 , G11C2213/81 , H01L23/53276 , H01L29/0673 , H01L29/068 , H01L29/1606 , H01L29/207 , H01L29/267 , H01L33/06 , H01L51/0048 , H01L2924/0002 , H01L2924/12044 , H01L2924/3011 , Y02E10/549 , H01L2924/00
摘要: Published without an