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    ACCELERATION SENSOR
    1.
    发明授权
    ACCELERATION SENSOR 有权

    公开(公告)号：EP2352037B1

    公开(公告)日：2013-07-10

    申请号：EP09829025.7

    申请日：2009-11-19

    申请人： Panasonic Corporation

    发明人： YOSHIDA, Hitoshi ,  SUZUKI, Yuji ,  IBARA, Nobuyuki ,  UEDA, Hideki ,  OKADA, Takeshi

    IPC分类号： G01P15/125 ,  G01P15/18 ,  H01L29/84

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

    摘要： An acceleration sensor includes: a rectangular moving electrode (4, 5); a pair of beams (6a, 6b, 7a, 7b) which connect to centers of two opposite sides of the moving electrode (4, 5), and support the moving electrode (4, 5) freely swingably; and first and second fixed electrodes (20a, 20b, 21 a, 21 b) which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode (4, 5) at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode (4, 5), first and second recessed portions (11a, 11b, 11c, 11d, 13a, 13b, 13c, 13d, 12, 14) are formed on one side of the boundary line and the other side thereof, respectively.

    ACCELERATION SENSOR
    2.
    发明公开
    ACCELERATION SENSOR 审中-公开
    加速度传感器

    公开(公告)号：EP2506018A2

    公开(公告)日：2012-10-03

    申请号：EP10832714.9

    申请日：2010-11-23

    申请人： Panasonic Corporation

    发明人： YOSIDA, Hitoshi ,  IBARA, Nobuyuki ,  UEDA, Hideki ,  OKADA, Takeshi ,  MORI, Takeshi ,  NOMURA, Masatosi ,  KAKIMOTO, Katumi ,  SUZUKI, Yuji

    IPC分类号： G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  H01L29/84

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

    摘要： An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

    摘要翻译： 一种加速度传感器，包括：具有凹部和实心部的重量部;梁部;可动电极，设置在所述重量部的与所述凹部的开放表面相反的表面上，以在所述凹部和所述实心部上延伸; 布置在可动电极的与凹部相对的一侧的第一固定电极以及布置在可动电极的与固体部分相反的一侧的第二固定电极。 加速度传感器利用由重量部分的旋转引起的可动电极和固定电极之间的电容变化来检测加速度。 梁部分朝向凹部移动，使得从配重部分的重心位置到旋转轴线的垂直线与可移动电极的表面之间的角度等于45度。