LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS
    3.
    发明授权
    LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS 有权
    具有可变轴向和横向分辨率的低相干干涉仪

    公开(公告)号:EP3002546B1

    公开(公告)日:2017-07-05

    申请号:EP15187028.4

    申请日:2015-09-28

    IPC分类号: G01B9/02 G02B21/00

    摘要: In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.

    摘要翻译: 在内层测量方法中,通过改变从灯发射的光通过短通滤波器的位置和通过短通滤波器的位置中的至少一个来形成具有比第一照射光更长的峰值波长的第一照射光和第二照射光, 从灯发出的光透过长通滤波器的位置。 然后,通过用第一照射光照射第一XY截面来测量半透明体的第一XY截面表面。 通过用第二照射光照射第二XY截面表面来测量位于比第一XY截面表面更深的层上的第二XY截面表面。 每个短通滤波器和长通滤波器都可以透射光,并且具有根据透射光的位置改变截止波长的特性。

    PROTECTION MEMBER
    5.
    发明公开
    PROTECTION MEMBER 有权
    保护元件和方法使用保护组件

    公开(公告)号:EP3018518A1

    公开(公告)日:2016-05-11

    申请号:EP15808069.7

    申请日:2015-04-07

    IPC分类号: G02B21/00 G11B7/135 G11B7/22

    摘要: A protective member protects an obj ective lens. The protective member includes an insertion opening through which an objective lens is configured to be inserted and a main body configured to cover the inserted objective lens. The main body includes a side wall portion connected to the insertion opening and a bottom portion connected to the side wall portion as well as facing the insertion opening, and covers the inserted objective lens with the side wall portion and the bottom portion. The protective member further includes a liquid disposed inside the main body, a sealing film body for sealing the insertion opening and a window arranged in the bottom portion of the main body, through which light transmits. The protective member can simplify the work.

    LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS
    6.
    发明公开
    LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS 有权
    NIEDRIGKOHÄRENZINTERFEROMETERMIT VERSTELLBAREN AXIALEN UND TRANSVERSALENAUFLÖSUNGEN

    公开(公告)号:EP3002546A1

    公开(公告)日:2016-04-06

    申请号:EP15187028.4

    申请日:2015-09-28

    IPC分类号: G01B9/02 G02B21/00

    摘要: In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.

    摘要翻译: 在内层测量方法中,通过改变从灯发出的光通过短路滤波器的位置中的至少一个而形成具有比第一照射光的波长长的峰值波长的第一照射光和第二照射光,以及 从灯发出的光通过长通滤光器透射的位置。 然后,通过用第一照射光照射第一XY截面来测量半透明体的第一XY截面。 通过用第二照射光照射第二XY截面来测量位于比第一XY截面更深的层的第二XY截面。 短路滤波器和长距离滤波器中的每一个可以透射光,并且具有根据光的发射位置改变截止波长的性质。