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    METHOD AND APPARATUS FOR THE RAPID ACQUISITION OF DATA IN COHERENCE SCANNING INTERFEROMETRY
    1.
    发明公开
    METHOD AND APPARATUS FOR THE RAPID ACQUISITION OF DATA IN COHERENCE SCANNING INTERFEROMETRY 失效
    方法和执行对快速数据采集的一致性扫描干涉

    公开(公告)号：EP0746745A4

    公开(公告)日：1997-12-17

    申请号：EP94907841

    申请日：1994-01-13

    申请人： ZYGO CORP

    发明人： DECK LESLIE L

    IPC分类号： G01B9/02 ,  G01B9/04 ,  G01B11/02 ,  G01B11/24 ,  G01B11/00

    CPC分类号： G01B11/026 ,  G01B9/02009 ,  G01B9/02072 ,  G01B9/02079 ,  G01B9/02083 ,  G01B9/0209 ,  G01B9/04

    摘要： A method of profiling a rough surface of an object includes the steps of producing an interference pattern of the object surface (14) using an interferometer (1) to produce an illumination intensity on the pixels of an imaging device (18), varying the optical path difference between the object surface (14) and a reference surface (22) of the interferometer (1) through a range including a position of zero optical path difference for each pixel, calculating values of an interference discriminator function to identify the regions of coherence, gathering at the imaging device (18) and storing for each pixel a plurality of intensity values about the region of coherence - as identified by the state or value of the interference discriminator function calculations - at consecutive data points spaced along the range by a predetermined phase difference, storing for each pixel the relative position of the plurality of intensity values along the range, and calculating from the stored intensity values the difference in height between two selected pixels using methods known in the art. An apparatus for practising the invention is also disclosed.

    3-D imaging system and method using partial-coherence speckle interference tomography
    5.
    发明公开
    3-D imaging system and method using partial-coherence speckle interference tomography 有权
    3D-Abbildungssystem und Verfahren mitkurzkohärenterSpeckle Interferenz-Tomografie

    公开(公告)号：EP2375216A1

    公开(公告)日：2011-10-12

    申请号：EP11152555.6

    申请日：2011-01-28

    申请人： Raytheon Company

    发明人： Byren, Robert W.

    IPC分类号： G01B11/24 ,  G06K9/20 ,  G06T7/00

    CPC分类号： G01B11/24 ,  G01B9/02009 ,  G01B9/02096 ,  G06K9/00228 ,  G06K9/20

    摘要： A system (100) for generating an image of contoured surface (50) includes a light source (120) that is configured to project an electromagnetic radiation beam (126) onto the contoured surface, wherein the projected beam generates first radiation (128) reflected from a first portion of the contoured surface to form a speckle pattern, and second radiation (128) reflected from a second portion of the contoured surface which is substantially uniform in intensity. The reflected first and second reflected radiation is received by an optical detector (135), and may be processed. The processing is configured to (1) generate a plurality of images from the first and second reflected radiation, with each image being generated using different coherence length electromagnetic radiation from the light source, and (2) generate a 3-D image (170) of the contoured surface from the plurality of images. Methods for generating a 3-D image of a contoured surface are also disclosed.

    摘要翻译： 用于产生轮廓表面（50）的图像的系统（100）包括被配置为将电磁辐射束（126）投影到轮廓表面上的光源（120），其中投影光束产生反射的第一辐射（128） 从所述轮廓表面的第一部分形成斑点图案，以及从所述轮廓表面的基本上均匀强度的第二部分反射的第二辐射（128）。 反射的第一和第二反射辐射由光学检测器（135）接收，并且可以被处理。 该处理被配置为（1）从第一和第二反射辐射生成多个图像，其中使用来自光源的不同相干长度电磁辐射生成每个图像，以及（2）生成3D图像（170） 的多个图像中的轮廓表面。 还公开了用于生成轮廓表面的3D图像的方法。

    LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS
    7.
    发明公开
    LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS 有权
    NIEDRIGKOHÄRENZINTERFEROMETERMIT VERSTELLBAREN AXIALEN UND TRANSVERSALENAUFLÖSUNGEN

    公开(公告)号：EP3002546A1

    公开(公告)日：2016-04-06

    申请号：EP15187028.4

    申请日：2015-09-28

    申请人： Panasonic Intellectual Property Management Co., Ltd.

    发明人： OIKAZE, Hirotoshi ,  KABETANI, Yasuhiro ,  TAKECHI, Yohei ,  FURUTA, Tomotaka

    IPC分类号： G01B9/02 ,  G02B21/00

    CPC分类号： G02B21/002 ,  G01B9/02002 ,  G01B9/02007 ,  G01B9/02009 ,  G01B9/02048 ,  G01B9/02057 ,  G01B9/0209 ,  G01B9/04 ,  G02B21/0016 ,  G02B21/14 ,  G02B21/26 ,  G02B26/007

    摘要： In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.

    摘要翻译： 在内层测量方法中，通过改变从灯发出的光通过短路滤波器的位置中的至少一个而形成具有比第一照射光的波长长的峰值波长的第一照射光和第二照射光，以及 从灯发出的光通过长通滤光器透射的位置。 然后，通过用第一照射光照射第一XY截面来测量半透明体的第一XY截面。 通过用第二照射光照射第二XY截面来测量位于比第一XY截面更深的层的第二XY截面。 短路滤波器和长距离滤波器中的每一个可以透射光，并且具有根据光的发射位置改变截止波长的性质。

    LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS
    10.
    发明授权
    LOW COHERENCE INTERFEROMETER WITH VARIABLE AXIAL AND TRANSVERSAL RESOLUTIONS 有权
    具有可变轴向和横向分辨率的低相干干涉仪

    公开(公告)号：EP3002546B1

    公开(公告)日：2017-07-05

    申请号：EP15187028.4

    申请日：2015-09-28

    申请人： Panasonic Intellectual Property Management Co., Ltd.

    发明人： OIKAZE, Hirotoshi ,  KABETANI, Yasuhiro ,  TAKECHI, Yohei ,  FURUTA, Tomotaka

    IPC分类号： G01B9/02 ,  G02B21/00

    CPC分类号： G02B21/002 ,  G01B9/02002 ,  G01B9/02007 ,  G01B9/02009 ,  G01B9/02048 ,  G01B9/02057 ,  G01B9/0209 ,  G01B9/04 ,  G02B21/0016 ,  G02B21/14 ,  G02B21/26 ,  G02B26/007

    摘要： In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.

    摘要翻译： 在内层测量方法中，通过改变从灯发射的光通过短通滤波器的位置和通过短通滤波器的位置中的至少一个来形成具有比第一照射光更长的峰值波长的第一照射光和第二照射光， 从灯发出的光透过长通滤波器的位置。 然后，通过用第一照射光照射第一XY截面来测量半透明体的第一XY截面表面。 通过用第二照射光照射第二XY截面表面来测量位于比第一XY截面表面更深的层上的第二XY截面表面。 每个短通滤波器和长通滤波器都可以透射光，并且具有根据透射光的位置改变截止波长的特性。