公开(公告)号：EP2410353A2

公开(公告)日：2012-01-25

申请号：EP11185312.3

申请日：2009-12-04

申请人： Phase Focus Limited

发明人： Maiden, Andrew

IPC分类号： G01T1/00 ,  G06T11/00

CPC分类号： G01T1/00 ,  G06T11/006 ,  G06T2211/424

摘要： A method and apparatus are disclosed for providing image data. The method includes the steps of providing image data for constructing an image of a region of a target object, comprising the steps of: providing incident radiation from a radiation source at a target object and, via at least one detector, detecting an intensity of radiation scattered by the target object; estimating an object function indicating at least one characteristic of a region of the target object; estimating a probe function indicating at least one characteristic of the incident radiation; providing image data via an iterative process responsive to the detected intensity of radiation scattered by the target object, wherein in said iterative process each of the object function and probe function are iteratively re-estimated step by step with a running estimate of the probe function being utilised to determine a running estimate of the object function associated with the target object.

摘要翻译： 公开了一种用于提供图像数据的方法和设备。 该方法包括以下步骤：提供用于构建目标对象的区域的图像的图像数据，该方法包括以下步骤：在目标对象处提供来自辐射源的入射辐射，并且经由至少一个检测器检测辐射的强度 被目标物体散射; 估计指示目标物体的区域的至少一个特征的目标函数; 估计指示入射辐射的至少一个特征的探测函数; 经由迭代过程提供图像数据，所述迭代过程响应于由所述目标对象散射的所检测到的辐射的强度，其中在所述迭代过程中，所述目标函数和探测函数中的每一个被逐步迭代地重新估计，探测函数的运行估计为 用于确定与目标对象相关联的目标函数的运行估计。

公开(公告)号：EP2410353A3

公开(公告)日：2012-02-22

申请号：EP11185312.3

申请日：2009-12-04

申请人： Phase Focus Limited

发明人： Maiden, Andrew

IPC分类号： G01T1/00 ,  G06T11/00

CPC分类号： G01T1/00 ,  G06T11/006 ,  G06T2211/424

摘要： A method and apparatus are disclosed for providing image data. The method includes the steps of providing image data for constructing an image of a region of a target object, comprising the steps of: providing incident radiation from a radiation source at a target object and, via at least one detector, detecting an intensity of radiation scattered by the target object; estimating an object function indicating at least one characteristic of a region of the target object; estimating a probe function indicating at least one characteristic of the incident radiation; providing image data via an iterative process responsive to the detected intensity of radiation scattered by the target object, wherein in said iterative process each of the object function and probe function are iteratively re-estimated step by step with a running estimate of the probe function being utilised to determine a running estimate of the object function associated with the target object.

摘要翻译： 公开了一种用于提供图像数据的方法和装置。 该方法包括提供用于构建目标对象的区域的图像的图像数据的步骤，包括以下步骤：提供来自目标对象的辐射源的入射辐射，并且经由至少一个检测器检测辐射强度 被目标对象分散; 估计指示所述目标对象的区域的至少一个特征的对象函数; 估计指示入射辐射的至少一个特性的探测功能; 通过响应于所检测到的由目标对象散射的辐射强度的迭代过程来提供图像数据，其中在所述迭代过程中，每个目标函数和探测函数都被逐步地重新估计，探测函数的运行估计是 用于确定与目标对象相关联的对象函数的运行估计。