LEAD OXIDE BASED PHOTOSENSITIVE DEVICE AND ITS MANUFACTURING METHOD
    4.
    发明公开
    LEAD OXIDE BASED PHOTOSENSITIVE DEVICE AND ITS MANUFACTURING METHOD 审中-公开
    中铅氧化物类光感测装置及其制造方法

    公开(公告)号:EP1851807A1

    公开(公告)日:2007-11-07

    申请号:EP06710755.7

    申请日:2006-01-26

    CPC分类号: H01L31/09

    摘要: A method for manufacturing a photo-responsive device having a photo- sensitive layer is proposed. The method comprises the following steps: a) providing a clean substrate inside an evacuated evaporation chamber; b) evaporating lead oxide (PbO) from a first crucible to form a seeding layer on the surface of the substrate; c)affecting upon the seeding layer such that only tetragonal lead oxide forms the seeding layer and/or such that the initially grown orthorhombic lead oxide forming the seeding layer is transformed into tetragonal lead oxide; and d) continuing to evaporate lead oxide until the final thickness of the photo- sensitive layer has been deposited onto the substrate. As a result the method yields a photo- responsive device comprising a photo-sensitive layer of lead oxide, which entirely consists of tetragonal lead oxide.