公开(公告)号：EP3259237A1

公开(公告)日：2017-12-27

申请号：EP16704900.6

申请日：2016-02-10

申请人： Pilkington Group Limited ,  University College London

发明人： RAISBECK, Deborah ,  HURST, Simon James ,  PARKIN, Ivan P. ,  CARMALT, Claire J. ,  MANZI, Joe, A.

IPC分类号： C03C17/245 ,  C23C16/40 ,  C23C16/448 ,  C23C14/18

CPC分类号： C23C16/40 ,  C03C17/245 ,  C03C17/3417 ,  C03C2217/214 ,  C03C2217/215 ,  C03C2217/216 ,  C03C2217/228 ,  C03C2217/70 ,  C03C2218/152 ,  C23C14/18 ,  C23C16/407 ,  C23C16/4486

摘要： A process for depositing an inorganic material on a substrate, the process comprising, providing a substrate having a surface, providing a precursor mixture comprising a metal sulfonate, and delivering the precursor mixture to the surface of the substrate, wherein the surface of the substrate is at a substrate temperature of above 450 °C and is sufficient to effect decomposition of the metal sulfonate. The inorganic material may include a metal or a metal oxide. The preferred metal sulfonate is metal triflate.