公开(公告)号：EP1427868A2

公开(公告)日：2004-06-16

申请号：EP02717526.4

申请日：2002-02-28

申请人： Porter Instrument Company, Inc.

发明人： Porter, George ,  Wolf, Seth, B, ,  Albrecht, Charles, W,

IPC分类号： C23C16/448 ,  B01F3/02

CPC分类号： F22B27/16 ,  B01F3/022 ,  B01F3/04049 ,  B01F5/0413 ,  B01F2215/0096 ,  B67D2210/0006 ,  C23C16/4481 ,  C23C16/4486 ,  F16K27/003 ,  F22B27/14 ,  Y10T137/87885

摘要： A vaporizer (64E) is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots (18) formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer (64) for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exhanger (94F) having cross-slots (108) intersecting a plurality of seamless slots (18F) to reduce unvaporized liquid exiting the vaporizer.

公开(公告)号：EP1427868B1

公开(公告)日：2005-06-15

申请号：EP02717526.4

申请日：2002-02-28

申请人： Porter Instrument Company, Inc.

发明人： Porter, George ,  Wolf, Seth, B, ,  Albrecht, Charles, W,

IPC分类号： C23C16/448 ,  B01F3/02

CPC分类号： F22B27/16 ,  B01F3/022 ,  B01F3/04049 ,  B01F5/0413 ,  B01F2215/0096 ,  B67D2210/0006 ,  C23C16/4481 ,  C23C16/4486 ,  F16K27/003 ,  F22B27/14 ,  Y10T137/87885

摘要： A vaporizer (64E) is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots (18) formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer (64) for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exhanger (94F) having cross-slots (108) intersecting a plurality of seamless slots (18F) to reduce unvaporized liquid exiting the vaporizer.

摘要翻译： 提供蒸发器（64E）用于将诸如高纯度流的蒸气流输送到处理目的地，例如晶片处理室。 蒸发器包括加热的基座，其具有形成在其一个面中的一个或多个无缝槽（18），用于承载通过加热板的热量而蒸发的液体。 在一个实施例中，蒸发器包括用于在汽化之前雾化液体以降低汽化温度的雾化器（64）。 在一个实施例中，蒸发器包括热交换器（94F），其具有与多个无缝狭槽（18F）相交叉的交叉狭槽（108）以减少离开蒸发器的未汽化的液体。