公开(公告)号：EP2472269A3

公开(公告)日：2012-08-15

申请号：EP11250891.6

申请日：2011-11-11

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Guo, Shuwen ,  Splvak, Alexander ,  Fink, Anita

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass-formed from a single piece of material-movably positioned a predetermined distance above the substrate. The proof mass includes a plurality of electrode protrusions extending downward from the proof mass to form a gap of varying height between the proof mass and the substrate. The proof mass is configured to move in a direction parallel to the upper surfaces of each of the plurality of substrate electrodes when the object is accelerating, which results in a change in the area of the gap, and a change in capacitance between the substrate and the proof mass. The in-plane accelerometer can be fabricated using the same techniques used to fabricate an out-of-plane accelerometer and is suitable for high-shock applications.

公开(公告)号：EP2472269A2

公开(公告)日：2012-07-04

申请号：EP11250891.6

申请日：2011-11-11

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Guo, Shuwen ,  Splvak, Alexander ,  Fink, Anita

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass-formed from a single piece of material-movably positioned a predetermined distance above the substrate. The proof mass includes a plurality of electrode protrusions extending downward from the proof mass to form a gap of varying height between the proof mass and the substrate. The proof mass is configured to move in a direction parallel to the upper surfaces of each of the plurality of substrate electrodes when the object is accelerating, which results in a change in the area of the gap, and a change in capacitance between the substrate and the proof mass. The in-plane accelerometer can be fabricated using the same techniques used to fabricate an out-of-plane accelerometer and is suitable for high-shock applications.

Abstract translation: 一种用于确定物体的平面内加速度的系统。 该系统包括平面内加速度计，该平面内加速度计具有刚性地附接到物体的基底以及由单块材料形成的质量块 - 可移动地定位在基底上预定距离处。 所述检测质量块包括从所述检测质量块向下延伸的多个电极突起，以在所述检测质量块和所述衬底之间形成不同高度的间隙。 当物体加速时，检测质量块被配置为在平行于多个基底电极中的每个的上表面的方向上移动，这导致间隙面积的变化以及基底和 检验质量。 平面内加速度计可以使用与用于制造平面外加速度计相同的技术来制造，并且适用于高冲击应用。