公开(公告)号：EP2899524B1

公开(公告)日：2017-02-08

申请号：EP14199793.2

申请日：2014-12-22

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Fahimi, Saeed ,  Eriksen, Odd Harald Steen ,  Little, Charles ,  Fink, Anita

IPC: G01L19/00 ,  G01L19/06

CPC classification number: G01L19/0681 ,  B81B2201/0264 ,  G01L19/0069 ,  G01L19/0084

公开(公告)号：EP2873958A1

公开(公告)日：2015-05-20

申请号：EP14193262.4

申请日：2014-11-14

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Zhang, Weibin ,  Fink, Anita ,  Fahimi, Saeed ,  Childress, Kimiko J.

IPC: G01L9/00 ,  G01L19/00 ,  G01L19/06

CPC classification number: G01L1/14 ,  G01L9/0047 ,  G01L9/0075 ,  G01L19/0076 ,  G01L19/0618

Abstract: A capacitive pressure sensor (100) includes a substrate wafer (114) and a diaphragm wafer (112). The substrate wafer defines a substrate recess (R") with a first depth (D2). The diaphragm wafer defines a diaphragm recess (R"') with a second depth (D3). The diaphragm wafer is bonded to the substrate wafer such that the substrate and diaphragm recesses form a height differentiated pressure chamber (126).

Abstract translation: 电容式压力传感器（100）包括衬底晶片（114）和光阑晶片（112）。 衬底晶片限定具有第一深度（D2）的衬底凹槽（R“）。膜片晶片限定具有第二深度（D3）的隔膜凹部（R”'）。 隔膜晶片结合到基板晶片，使得基板和隔膜凹槽形成高度差分压力室（126）。

公开(公告)号：EP2899524A1

公开(公告)日：2015-07-29

申请号：EP14199793.2

申请日：2014-12-22

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Fahimi, Saeed ,  Eriksen, Odd Harald Steen ,  Little, Charles ,  Fink, Anita

IPC: G01L19/00

CPC classification number: G01L19/0681 ,  B81B2201/0264 ,  G01L19/0069 ,  G01L19/0084

Abstract: A pressure sensor assembly (100) includes a pressure sensor (101) having a pressure sensing transducer connected to a plurality of electrode pins (103) via a plurality of electrode pads (105) disposed on the transducer, an inner casing (107) configured to hold the pressure sensing transducer including a plurality of inner casing electrode pin channels (111) having the electrode pins disposed therein. The pressure sensor further includes an outer casing (115) holding the inner casing therein having a capsule header (117) with a plurality of capsule header electrode pin channels (119) defined therein which can include a ceramic seal (133) disposed therein such that the capsule header electrode pin channels engage the electrode pins in an insulating sealed relationship. The outer casing further includes an isolator plate (127) including an isolator plate fluid port (129) defined therein and a pressure isolator (131) disposed on the isolator plate and configured to deflect in response to a change in ambient pressure. The pressure sensor includes a pressure transmitting fluid disposed in the fluid volume.

Abstract translation: 压力传感器组件（100）包括压力传感器（101），压力传感器（101）具有通过设置在换能器上的多个电极焊盘（105）连接到多个电极引脚（103）的压力感测传感器，内部壳体（107） 以保持包括多个内壳电极引脚通道（111）的压力感测传感器，其中设置有电极引脚。 该压力传感器还包括一个外壳（115），其内部容纳有内壳，该壳体具有胶囊集管（117），胶囊集管（117）具有限定在其中的多个胶囊集管电极销通道（119），其中可包括设置在其中的陶瓷密封件（133） 胶囊头电极针通道以绝缘密封的关系接合电极销。 外壳还包括隔离板（127），隔离板包括限定在其中的隔离板流体端口（129）和设置在隔离板上的压力隔离器（131），并被配置为响应于环境压力的变化而偏转。 压力传感器包括设置在流体体积中的压力传递流体。

公开(公告)号：EP2472269A3

公开(公告)日：2012-08-15

申请号：EP11250891.6

申请日：2011-11-11

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Guo, Shuwen ,  Splvak, Alexander ,  Fink, Anita

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass-formed from a single piece of material-movably positioned a predetermined distance above the substrate. The proof mass includes a plurality of electrode protrusions extending downward from the proof mass to form a gap of varying height between the proof mass and the substrate. The proof mass is configured to move in a direction parallel to the upper surfaces of each of the plurality of substrate electrodes when the object is accelerating, which results in a change in the area of the gap, and a change in capacitance between the substrate and the proof mass. The in-plane accelerometer can be fabricated using the same techniques used to fabricate an out-of-plane accelerometer and is suitable for high-shock applications.

公开(公告)号：EP2873958B1

公开(公告)日：2019-08-07

申请号：EP14193262.4

申请日：2014-11-14

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Zhang, Weibin ,  Fink, Anita ,  Fahimi, Saeed ,  Childress, Kimiko J.

IPC: G01L9/00 ,  G01L19/00 ,  G01L19/06

公开(公告)号：EP2472269A2

公开(公告)日：2012-07-04

申请号：EP11250891.6

申请日：2011-11-11

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Guo, Shuwen ,  Splvak, Alexander ,  Fink, Anita

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A system for determining in-plane acceleration of an object. The system includes an in-plane accelerometer with a substrate rigidly attached to an object, and a proof mass-formed from a single piece of material-movably positioned a predetermined distance above the substrate. The proof mass includes a plurality of electrode protrusions extending downward from the proof mass to form a gap of varying height between the proof mass and the substrate. The proof mass is configured to move in a direction parallel to the upper surfaces of each of the plurality of substrate electrodes when the object is accelerating, which results in a change in the area of the gap, and a change in capacitance between the substrate and the proof mass. The in-plane accelerometer can be fabricated using the same techniques used to fabricate an out-of-plane accelerometer and is suitable for high-shock applications.

Abstract translation: 一种用于确定物体的平面内加速度的系统。 该系统包括平面内加速度计，该平面内加速度计具有刚性地附接到物体的基底以及由单块材料形成的质量块 - 可移动地定位在基底上预定距离处。 所述检测质量块包括从所述检测质量块向下延伸的多个电极突起，以在所述检测质量块和所述衬底之间形成不同高度的间隙。 当物体加速时，检测质量块被配置为在平行于多个基底电极中的每个的上表面的方向上移动，这导致间隙面积的变化以及基底和 检验质量。 平面内加速度计可以使用与用于制造平面外加速度计相同的技术来制造，并且适用于高冲击应用。