公开(公告)号：EP2904455A1

公开(公告)日：2015-08-12

申请号：EP13774337.3

申请日：2013-09-27

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： DONAHER, J., Casey ,  SIMPSON, Craig ,  DUFAULT, Peter John, Gerard

IPC: G03F7/20 ,  H02K41/03

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  H02K41/02 ,  H02K41/031 ,  H02K2201/18

Abstract: A planar motor system (800) comprises a platen (802) with a first planar motor component and a stage (812) with a second planar motor component (1010, 1012, 1020, 1022). The stage can move along a first cardinal axis (X) or a second cardinal axis (Y). The planar motor system further comprises a drive system (1050). When the drive system is energized in a first drive configuration, it applies a first force and a second force. The first force and the second force are not parallel to any cardinal axis. A vector sum of the first force and the second force is parallel to the first cardinal axis. When the drive system is energized in a second drive configuration, it applies a third force and a fourth force. The third force and the fourth force are not parallel to any cardinal axis. A vector sum of the third force and the fourth force is parallel to the second cardinal axis.