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1.发明公开
公开(公告)号：EP2153166A1
公开(公告)日：2010-02-17
申请号：EP08736008.7
申请日：2008-04-09
申请人： Robert Bosch GmbH
摘要： The invention relates to a device for measuring the shape of freeform surfaces of objects to be measured, said device comprising a point-measuring optical and/or interferometric scanning arm, which can be displaced along a predefined line, and a measurement beam focussed on the freeform surface to be measured. According to the invention, the scanning arm may rotate in at least one plane relative to its scanning point so that the measurement beam strikes the freeform surface to be measured perpendicularly or within an acceptance angle of the scanning arm.
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公开(公告)号：EP1725832B1
公开(公告)日：2007-12-19
申请号：EP05701457.3
申请日：2005-01-07
申请人： ROBERT BOSCH GMBH
发明人： DRABAREK, Pawel
CPC分类号： G01B9/02065 , G01B9/02007 , G01B9/02027 , G01B9/0209 , G01B11/2441 , G01D5/35383
摘要： The invention relates to an interferometric measuring arrangement for measuring, for example, form errors, position, surface properties and oscillations of an object. This arrangement is provided with a transmitting part, which has a modulation interferometer (12) and a radiation source (11) for short-coherent radiation, with a measuring probe arrangement (30), which is connected to said transmitting part for supplying the radiation over a common light path (41), and with a receiving part (15), which is combined with the transmitting part to form a transmitting/receiving unit (10), for evaluating the measured radiation returning from the measuring probe arrangement. A reduced complexity with improved possible uses is achieved by virtue of the fact that the measuring probe arrangement (30) has a number of measuring probes (32.1, 32.4), which are coupled to the same light path (41) via respective optical light paths (42), and that a switching device (20) is placed at a coupling location between the common light path (41) and the respective light paths (24) to the measuring probes (32.1, 32.4), and via this switching device, the different measuring probes (32.1, 32.4) can be individually brought into a bi-directional transmission connection with the transmitting/receiving unit (10) for the radiation supplied by the modulation interferometer (12) on one side and for the measured radiation on the other.
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公开(公告)号：EP1725832A1
公开(公告)日：2006-11-29
申请号：EP05701457.3
申请日：2005-01-07
申请人： ROBERT BOSCH GMBH
发明人： DRABAREK, Pawel
CPC分类号： G01B9/02065 , G01B9/02007 , G01B9/02027 , G01B9/0209 , G01B11/2441 , G01D5/35383
摘要： The invention relates to an interferometric measuring arrangement for measuring, for example, form errors, position, surface properties and oscillations of an object. This arrangement is provided with a transmitting part, which has a modulation interferometer (12) and a radiation source (11) for short-coherent radiation, with a measuring probe arrangement (30), which is connected to said transmitting part for supplying the radiation over a common light path (41), and with a receiving part (15), which is combined with the transmitting part to form a transmitting/receiving unit (10), for evaluating the measured radiation returning from the measuring probe arrangement. A reduced complexity with improved possible uses is achieved by virtue of the fact that the measuring probe arrangement (30) has a number of measuring probes (32.1, 32.4), which are coupled to the same light path (41) via respective optical light paths (42), and that a switching device (20) is placed at a coupling location between the common light path (41) and the respective light paths (24) to the measuring probes (32.1, 32.4), and via this switching device, the different measuring probes (32.1, 32.4) can be individually brought into a bi-directional transmission connection with the transmitting/receiving unit (10) for the radiation supplied by the modulation interferometer (12) on one side and for the measured radiation on the other.
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公开(公告)号：EP1546645B1
公开(公告)日：2006-03-01
申请号：EP03727156.6
申请日：2003-03-28
申请人： ROBERT BOSCH GMBH
CPC分类号： G01B11/2441 , G01B9/02002 , G01B9/0205 , G01B9/02057 , G01B9/02064 , G01B9/0209 , G01B2290/45
摘要： The invention relates to an interferometric measuring device for detecting the shape, roughness, and distance of the surface of an object (8) to be measured by means of a modulation interferometer (2) to which short coherent radiation is supplied by a source of radiation (1) and which comprises a first beam splitter (2.3) for splitting the supplied radiation into a first partial beam (2.1) that is guided across a first arm and a second partial beam (2.1') that is guided across a second arm. The light phase or light frequency of one of said partial beams is shifted relative to the other partial beam by means of a modulation device (2.2, 2.2'), said partial beam traveling across a delay loop (2.9'), whereupon the partial beams are reunited at another beam splitter (2.10) of the modulation interferometer (2). The inventive interferometric measuring device also comprises a measuring probe (3) which is spatially separated from the modulation interferometer (2) and is or can be coupled thereto via a light-conducting fiber array (6). The reunited partial beams are split into a measuring beam and a reference beam in a partially permeable area (3.3) of a common arm of said measuring probe (3), and the measuring beam (r1(t)) reflected on the surface and the reference beam (r2(t)) reflected on a reference plane are superimposed therein. Said interferometric measuring device further comprises a receiver device (4) and an evaluation unit (5) for converting the radiation directed thereto into electrical signals and evaluating said signals based on a phase difference. A favorable design for taking reliable measurements even in tight hollow spaces is created by the fact that the partially permeable area (3.3) is formed by means of an exit area (3.31) of a probe fiber (3.1), which is slanted relative to the optical probe axis (3.5) by an exit angle (a), and an entrance area (3.32) of a fiber section that follows in the direction of the object, said entrance area also being slanted relative to the optical probe axis (3.5) by an entrance angle (ß). A cuneiform gap is formed between the exit area (3.31) and the entrance area (3.32).
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5.发明授权
公开(公告)号：EP0941448B1
公开(公告)日：2003-02-19
申请号：EP97948718.8
申请日：1997-11-06
申请人： ROBERT BOSCH GMBH
发明人： DRABAREK, Pawel
CPC分类号： G01B9/02004
摘要： The present invention relates to a method for measuring the positions and the position changes, as well as the physical quantities derivated therefrom, of an element to be examined according to the method of heterodyne interferometry. In order to generate the heterodyne frequency, a laser is modulated by means of a time-varying injection current in such a way that its radiation frequency is changed, that the radiation is directed toward the element to be examined by using an optical deviation on one side and no optical deviation on the other side, and then redirected to a measuring receiver. With regard to a small-sized object, the measured values are better assessed if the shape of the injection current signal is characterized by a steep rising edge in relation to its pulse duration, followed by a plateau.
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6.发明公开
公开(公告)号：EP0937229A1
公开(公告)日：1999-08-25
申请号：EP98951246.0
申请日：1998-09-01
申请人： ROBERT BOSCH GMBH
发明人： DRABAREK, Pawel
CPC分类号： G01B11/303 , G01B9/02003 , G01B9/02058 , G01B9/02065 , G01B9/0209 , G01B2290/40
摘要： The invention relates to an interferometric measuring device for form measurement on rough surfaces of a measurement object (7). Measurement is carried out by means of short-coherent radiation, whereby the light path or duration of a reference beam (4) are periodically modulated and brought to interference with a measuring beam (18) reflected by the surface of the measurement object (7) and the interfered radiation is analysed for the maximum of the interference contrast. Although simple to construct the measuring device achieves high measuring accuracy because it comprises a modulation interferometer system (MI) in which the light path is altered by means of acousto-optic deflectors (8, 9) and a compensation device (C1, C2) for correcting spatial decoherence and dispersion. In a demodulation interferometer system (DI) positioned downstream the measuring beam (18) is interfered with the reference beam (4) and transmitted to a photodetector (11).
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公开(公告)号：EP2734808A1
公开(公告)日：2014-05-28
申请号：EP12738425.3
申请日：2012-07-10
申请人： Robert Bosch GmbH
CPC分类号： G01B11/2441 , G01B9/0209 , G01B11/007 , G01B11/30
摘要： The invention relates to an apparatus for determining in a tactile manner a surface form of a measurement object with a microsensing arm having a sensing tip. According to the invention, the microsensing arm is secured to an optical fibre with a fibre end, which optical fibre is held in a sensor housing, a reference mirror is provided in the sensor housing, and an optical, in particular interferometric measuring device is provided for determining the position of the fibre end relative to the reference mirror. The apparatus according to the invention permits a cost-effective tactile determination of the form of a measurement object, such as the roughness thereof. On account of the microsensing arm being held at the optical fibre, no mechanical articulation for the microsensing arm is necessary. The contactless interferometric determination of the distance between the fibre end of the optical fibre and the reference mirror, which is mounted in the sensor housing, permits a particularly precise determination of the surface form of the measurement object.
摘要翻译： 用于触觉地确定测量对象的表面形状的装置包括具有触针尖端的微型探针臂，该微型探针臂被固定在具有纤维端的光纤上，该光纤端口安装在探针外壳中，参考镜 设置在探针外壳中，并且提供光学测量装置用于确定光纤端相对于参考反射镜的位置。 无接触干涉测定光纤的纤维端与安装在探头外壳中的参考反射镜之间的距离允许精确确定测量对象的表面形状。
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8.发明公开OPTISCHE ANORDNUNG ZUR BELEUCHTUNG EINES MESSOBJEKTES UND INTERFEROMETRISCHE ANORDNUNG ZUR VERMESSUNG VON FLÄCHEN EINES MESSOBJEKTES 有权用于照亮测量对象与干涉式安排的光学系统，用于测量对象的测量面
公开(公告)号：EP2276999A1
公开(公告)日：2011-01-26
申请号：EP09738008.3
申请日：2009-04-16
申请人： Robert Bosch GmbH
IPC分类号： G01B9/02
CPC分类号： G01B9/02021 , G01B9/02007 , G01B9/02028 , G01B9/0209
摘要： The invention relates to an interferometric arrangement (300) for measuring surfaces (281, 282) of a measured object (280), said interferometric arrangement comprising an optical arrangement (200). The optical arrangement (200) comprises a beam splitter (250) which guides working beams towards the surfaces (281, 282) of the measured object in a first beam path and in a second beam path by means of two mirrors (260, 270). The beam paths formed by the light beams reflected on the surfaces (281, 282) at least partially overlap each other in an area with the same beam direction. In this way, measured surfaces (281, 282) of the measured object (280) are imaged at least partially onto an identical irradiated surface of a detector (90), for example, an image recorder.
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公开(公告)号：EP1546646A1
公开(公告)日：2005-06-29
申请号：EP03720249.6
申请日：2003-03-28
申请人： Robert Bosch GmbH
IPC分类号： G01B9/02
CPC分类号： G01B9/02065 , G01B9/0205 , G01B9/02057 , G01B9/0209
摘要： The invention relates to an interferometric measuring device for detecting the shape, roughness, and distance of the surface of an object (8) to be measured by means of a modulation interferometer (2) to which short coherent radiation is supplied by a source of radiation (1) and which comprises a first beam splitter (2.3) for splitting the supplied radiation into a first partial beam (2.1) that is guided across a first arm and a second partial beam (2.1') that is guided across a second arm. The light phase or light frequency of one of said partial beams is shifted relative to the other partial beam by means of a modulation device (2.2, 2.2'), said partial beam traveling across a delay loop (2.9'), whereupon the partial beams are reunited at another beam splitter (2.10) of the modulation interferometer (2).
摘要翻译： 本发明涉及一种干涉测量装置，其用于通过调制干涉仪（2）检测待测物体（8）的表面的形状，粗糙度和距离，所述调制干涉仪（2）通过辐射源 （1）并且包括第一分束器（2.3），用于将所提供的辐射分成引导越过第一臂的第一部分光束（2.1）和引导越过第二臂的第二部分光束（2.1'）。 借助于调制装置（2.2,2.2'）使所述部分光束之一的光相位或光频率相对于另一部分光束偏移，所述部分光束在延迟环路（2.9'）上行进，由此部分光束 在调制干涉仪（2）的另一个分束器（2.10）处重新聚集。
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公开(公告)号：EP0983483B1
公开(公告)日：2002-08-07
申请号：EP98934796.8
申请日：1998-05-26
申请人： ROBERT BOSCH GMBH
发明人： DRABAREK, Pawel
CPC分类号： G01B9/0209 , G01B9/02058 , G01B2290/40 , G01J9/02
摘要： The invention relates to an interferometric measuring device for measuring form on rough surfaces of an object, comprising a unit for producing a beam, said unit emitting a short-coherent beam and a beam-splitting device for producing a reference beam which is directed onto a device with a reflective element for periodically altering the path of light and a measuring beam which is directed onto the object. The inventive device also has a superimposition element on which the measuring beam coming from the object and the reference beam coming from the device are caused to interfere, and a photo sensor for recording the interfered beam. The invention provides a simple construction which nonetheless guarantees highly accurate measuring. The device for altering the light path has a parallel displacement system which is positioned in the path of the beam, the reflective element being placed in a fixed position behind said parallel displacement system. A compensation grating is also located in the path of the reference beam, in front of the parallel displacement system. The reference beam is diffracted on said compensation grating both before and after passing through the parallel displacement device.
摘要翻译： 本发明涉及一种用于测量物体的粗糙表面上的形状的干涉测量装置，包括用于产生光束的单元，所述单元发射短相干光束和用于产生参考光束的光束分离装置，所述参考光束被引导到 装置具有用于周期性地改变光路的反射元件和被引导到物体上的测量光束。 本发明的装置还具有来自物体的测量光束和来自装置的参考光束干涉的叠加元件以及用于记录干涉光束的光传感器。 本发明提供了一种简单的结构，但保证了高度准确的测量。 用于改变光路的装置具有位于梁的路径中的平行位移系统，反射元件被放置在所述平行位移系统后面的固定位置中。 补偿光栅也位于平行位移系统前方的参考光路中。 参考光束在通过平行位移装置之前和之后在所述补偿光栅上被衍射。
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