摘要:
A piezoelectric element includes a single crystal piezoelectric film (111) of aluminum nitride (AlN), wherein a full width at half maximum (FWHM) of a (002) diffraction peak is smaller than 1.0 degree. The AlN film is c-axis oriented, particularly suited for bulk acoustic wave (FBAR) or surface acoustic wave (SAW) devices, and may be formed on a base substrate (110), such as Si, SiC, and sapphire, by a chemical vapor deposition (CVD) or molecular beam epitaxy (MBE) process.
摘要:
An inkjet printing head 1 includes a pressure chamber 5, a movable film formation layer 10 that includes a movable film 10A defining a top surface portion of the pressure chamber 5, and a piezoelectric element 6 that is formed to contact a surface of the movable film 10A at an opposite side from the pressure chamber 5 and having a peripheral edge receded further toward an interior of the pressure chamber 5 than the movable film 10A in plan view. The piezoelectric element 6 includes a lower electrode 7 formed on a surface of the movable film formation layer 10 at the opposite side from the pressure chamber 5, an upper electrode 9 disposed at an opposite side from the movable film formation layer 10 with respect to the lower electrode 7, and a piezoelectric film 8 provided between the upper electrode 9 and the lower electrode 7, and the upper electrode 9 has a thin portion 92 at least at a portion of a peripheral edge portion.
摘要:
A highly transparent fiber composite material is provided that can be manufactured through a simplified process using reduced amounts of raw materials and that has high flexibility and low thermal expansivity and retains good functionality of the fiber material. The fiber composite material includes: a fiber assembly having an average fiber diameter of 4 to 200 nm and a 50 µm-thick visible light transmittance of 3% or more; and a coating layer that coats and smoothes the surface of the fiber assembly, wherein the fiber composite material has a 50 µm-thick visible light transmittance of 60% or more. With this fiber assembly, the scattering of light caused by the irregularities on the surface can be suppressed by coating the surface with the coating layer to smooth the surface, whereby a highly transparent fiber composite material can be obtained.