公开(公告)号：EP1863079A2

公开(公告)日：2007-12-05

申请号：EP07010855.0

申请日：2007-06-01

申请人： Rohm and Haas Electronic Materials, L.L.C.

发明人： Pickering, Michael A. ,  Goela, Jitendra S. ,  Triba, Jamie L. ,  Payne, Thomas

IPC分类号： H01L21/673

CPC分类号： H01L21/67303

摘要： A wafer holding apparatus including a plurality of rods joined at opposite ends to endplates by joints having flanges with a fillet radius. The joints which join the component parts of the apparatus provide a stable wafer holding apparatus for manual handling as well as for the harsh processing conditions of semiconductor wafer processing chambers.

摘要翻译： 一种晶片保持装置，包括通过具有圆角半径的凸缘的接头在相对端连接到端板的多个杆。 连接装置的部件的接头提供用于手动操作的稳定的晶片保持装置以及半导体晶片处理室的恶劣处理条件。

公开(公告)号：EP1863079A3

公开(公告)日：2009-06-03

申请号：EP07010855.0

申请日：2007-06-01

申请人： Rohm and Haas Electronic Materials, L.L.C.

发明人： Pickering, Michael A. ,  Goela, Jitendra S. ,  Triba, Jamie L. ,  Payne, Thomas

IPC分类号： H01L21/673

CPC分类号： H01L21/67303

摘要： A wafer holding apparatus including a plurality of rods joined at opposite ends to endplates by joints having flanges with a fillet radius. The joints which join the component parts of the apparatus provide a stable wafer holding apparatus for manual handling as well as for the harsh processing conditions of semiconductor wafer processing chambers.