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公开(公告)号:EP1829084A1
公开(公告)日:2007-09-05
申请号:EP05811027.1
申请日:2005-11-03
发明人: FISCHER, Karin , KRAMER, Joseph
CPC分类号: H01L21/6708 , B08B3/02 , B08B11/02 , H01L21/6838
摘要: The invention relates to a rotatable and, optionally, heatable device for holding a flat substrate. The device comprises a supporting device for placing and holding the substrate on a supporting surface, and optionally comprises a heating device, a device for rotating the supporting device, and a device for applying a fluid, e.g. a solvent, onto the side of the substrate facing the supporting surface. The fluid is applied when the supporting device for supporting and holding the substrate is placed in rotation.
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公开(公告)号:EP1829084B1
公开(公告)日:2012-07-25
申请号:EP05811027.1
申请日:2005-11-03
发明人: FISCHER, Karin , KRAMER, Joseph
CPC分类号: H01L21/6708 , B08B3/02 , B08B11/02 , H01L21/6838
摘要: The invention relates to a rotatable and, optionally, heatable device for holding a flat substrate. The device comprises a supporting device for placing and holding the substrate on a supporting surface, and optionally comprises a heating device, a device for rotating the supporting device, and a device for applying a fluid, e.g. a solvent, onto the side of the substrate facing the supporting surface. The fluid is applied when the supporting device for supporting and holding the substrate is placed in rotation.
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